Optimization of an MEMS Magnetic Thin Film Vibrating Magnetometer

Perrier, Thomas; Lévy, R.; Bourgeteau-Verlhac, Beatrice; Kayser, P.; Moulin, Johan; Paquay, Stéphane

doi:10.1109/tmag.2016.2622480

Cited by 5 publications

(3 citation statements)

References 17 publications

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“…This is required as the fabrication process always causes some structural differences leading to different resonance frequencies. Especially a temperature gradient can increase this mismatch and deteriorate the measurement [4].…”

Section: Design Of the Structuresmentioning

confidence: 99%

MEMS cantilever based magnetic field gradient sensor

Dabsch

Rosenberg

Stifter

et al. 2017

J. Micromech. Microeng.

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This paper describes major contributions to a MEMS magnetic field gradient sensor. An H-shaped structure supported by four arms with two circuit paths on the surface is designed for measuring two components of the magnetic flux density and one component of the gradient. The structure is produced from silicon wafers by a dry etching process. The gold leads on the surface carry the alternating current which interacts with the magnetic field component perpendicular to the direction of the current. If the excitation frequency is near to a mechanical resonance, vibrations with an amplitude within the range of 1–103 nm are expected. Both theoretical (simulations and analytic calculations) and experimental analysis have been carried out to optimize the structures for different strength of the magnetic gradient. In the same way the impact of the coupling structure on the resonance frequency and of different operating modes to simultaneously measure two components of the flux density were tested. For measuring the local gradient of the flux density the structure was operated at the first symmetrical and the first anti-symmetrical mode. Depending on the design, flux densities of approximately 2.5 µT and gradients starting from 1 µT mm−1 can be measured.

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Section: Design Of the Structuresmentioning

confidence: 99%

MEMS cantilever based magnetic field gradient sensor

Dabsch

Rosenberg

Stifter

et al. 2017

J. Micromech. Microeng.

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“…Present MEMS shape optimization methods can be divided into two categories, which are: (1) local optimization informed by design expertise and (2) evolutionary algorithms (EAs), which aim to perform global optimization. In the first category, design expertise is firstly used to simplify the optimization problem by providing an initial design, narrowing down the search ranges and reducing the number of design variables based on sensitivity, [4]- [6]. This kind of method is playing an important role in modern high-performance MEMS optimization.…”

Section: Introductionmentioning

confidence: 99%

Efficient Design Optimization of High-Performance MEMS Based on a Surrogate-Assisted Self-Adaptive Differential Evolution

et al. 2020

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High-performance microelectromechanical systems (MEMS) are playing a critical role in modern engineering systems. Due to computationally expensive numerical analysis and stringent design specifications nowadays, both the optimization efficiency and quality of design solutions become challenges for available MEMS shape optimization methods. In this paper, a new method, called self-adaptive surrogate model-assisted differential evolution for MEMS optimization (ASDEMO), is presented to address these challenges. The main innovation of ASDEMO is a hybrid differential evolution mutation strategy combination and its self-adaptive adoption mechanism, which are proposed for online surrogate model-assisted MEMS optimization. The performance of ASDEMO is demonstrated by a high-performance electro-thermoelastic micro-actuator, a high-performance corrugated membrane micro-actuator, and a highly multimodal mathematical benchmark problem. Comparisons with state-of-the-art methods verify the advantages of ASDEMO in terms of efficiency and optimization ability.INDEX TERMS MEMS design optimization, high-performance MEMS design, surrogate model assisted evolutionary algorithm, Gaussian process, differential evolution.

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“…Furthermore, the magnetic properties of materials are essential for specialized MEMS devices such as magnetic sensors and actuators. Tailoring these magnetic properties can significantly boost the sensitivity and stability of sensors, and enhance the precision and response time of actuators [ 20 ]. In summary, optimizing the properties of these materials can improve the accuracy, sensitivity, and reliability of MEMS devices, thereby expanding their application scope in various fields.…”

mentioning

confidence: 99%