Optimization of a 0.69PZT-0.31PZNN thick film by controlling slurry viscosity and tape-casting blade height

Abstract

We investigated how the viscosities of piezoelectric lead zirconate titanate/lead zirconate nickel niobate (PZT-PZNN) slurry samples affect the laminated-film densities based on various conditions of degassing time for 0, 30, and 60 min. PZT-PZNN slurries with different viscosities were tape casted into green sheets by adjusting the comma blade height to 100, 200, 300, 400, and 500 μm. As a result the slurry viscosity linearly increased with increasing slurry degassing time, and the thickness of the green sheet increased with increasing comma blade height. The density and the dielectric properties of piezoelectric ceramic films with the same thicknesses, but composed of different numbers of layers, were compared. The laminated-film density and the dielectric property d33 × g33 increased with decreasing number of laminated layers. However, when the viscosity of the slurry was too high (degassing time > 60 min) and the comma blade height was too high (comma blade height > 300 μm), the tape-casted green sheet was too thick to have enough time to dry. By controlling the slurry viscosity by adjusting the degassing time and the comma blade height, we were able to optimize the thickness of the green sheet in a tape-casting. The optimal green sheet thickness was < 70 μm, and the number of sheets laminated should be minimized to increase the film's density and dielectric constant.