2021
DOI: 10.1109/tuffc.2020.3033704
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Optimal Design of TSM Langasite Resonator for High-Temperature Applications: A Review

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Cited by 6 publications
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“…Therefore, their possible applications include gas sensors, 7) microbalance, 8) and combustion pressure sensors, 9) which operate at temperatures higher than 300 °C. Promising candidates are langasite La 3 Ga 5 SiO 14 -type crystals, 10) rare-earth calcium oxoborate ReCa 4 O(BO 3 ) 3 (Re = Y, La-Lu) crystals, 11,12) gallium phosphate GaPO 4 , 8,13) and aluminum nitride AlN and its related nitride thick films, [14][15][16][17] which have been investigated vigorously. These crystals and thin films have one or more shortcomings in applications, as mentioned in Ref.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, their possible applications include gas sensors, 7) microbalance, 8) and combustion pressure sensors, 9) which operate at temperatures higher than 300 °C. Promising candidates are langasite La 3 Ga 5 SiO 14 -type crystals, 10) rare-earth calcium oxoborate ReCa 4 O(BO 3 ) 3 (Re = Y, La-Lu) crystals, 11,12) gallium phosphate GaPO 4 , 8,13) and aluminum nitride AlN and its related nitride thick films, [14][15][16][17] which have been investigated vigorously. These crystals and thin films have one or more shortcomings in applications, as mentioned in Ref.…”
Section: Introductionmentioning
confidence: 99%
“…Nevertheless, the application of quartz is limited to a maximum tempera-ture of 450 • C due to strongly increasing acoustic loss (Cernosek et al, 1998;Fritze, 2011a). Alternatively, piezoelectric materials like langasite (La 3 Ga 5 SiO 14 , LGS) or catangasite (Ca 3 TaGa 3 Si 2 O 14 , CTGS) enable the operation at fairly high temperatures, even above 1000 • C (Yu et al, 2016;Zu et al, 2016;Shah and Saha, 2021;Fritze, 2011b;Suhak et al, 2018;Sauerbrey, 1964;Seh et al, 2007).…”
Section: Introductionmentioning
confidence: 99%