Abstract:Abstract. High-temperature stable piezoelectric Ca3TaGa3Si2O14 and La3Ga5SiO14 resonators with keyhole-shaped Pt electrodes are coated with metal oxide films such as TiO2−δ and SnO2 that overlap the Pt electrodes. The resonators are exposed to reducing atmospheres in order to increase the electrical conductivity of the oxide film and then act as extended oxide electrodes. The resulting increase in the effective electrode radius causes an increase in the mass sensitivity of the resonators and, thereby, resonanc… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.