Optically driven micropump produced by three-dimensional two-photon microfabrication

Maruo, Shoji; Inoue, Hiroyuki

doi:10.1063/1.2358820

Cited by 225 publications

(131 citation statements)

References 18 publications

(17 reference statements)

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“…Dual rotating lobes, cooperatively driven by means of the time-divided scanning of a single laser beam, have been shown to produce very low flow rates on the order of 1 pl/min (Maruo and Inoue 2006). The lobes are driven by means of radiation-pressure generated by focusing a laser beam.…”

Section: Rotating Gearmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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Micropumping has emerged as a critical research area for many electronics and biological applications. A significant driving force underlying this research has been the integration of pumping mechanisms in micro Total Analysis Systems (μTAS) and other multi-functional analysis techniques. Uses in electronics packaging and micromixing and microdosing systems have also capitalized on novel pumping concepts. The present work builds upon a number of existing reviews of micropumping strategies by focusing on the large body of micropump advances reported in the very recent literature. Critical selection criteria are included for pumps and valves to aid in determining the pumping mechanism that is most appropriate for a given application. Important limitations or incompatibilities are also addressed. Quantitative comparisons are provided in graphical and tabular forms.

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Section: Rotating Gearmentioning

confidence: 99%

Recent advances in microscale pumping technologies: a review and evaluation

Iverson

Garimella

2008

Microfluid Nanofluid

421

249

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“…A near-infrared (NIR) pulsed laser beam tightly focused onto a photo-polymerizable monomer solidifies a nanometric volume of the monomer in the focus spot through TPP, and thus, arbitrary 3D micro/nano-sized polymer structures can be fabricated with a sub-diffraction-limit spatial resolution by scanning the focus spot three-dimensionally. Applications of the TPP lithography are extended to various research fields, such as photonic crystals [20,21], photonic quasicrystals [22], metamaterials [23,24], novel mechanical micro/nanostructures [25], microfluidics [26], functional micro/nano mechanical devices [27], cell culturing 3D scaffolds for tissue engineering [28], and novel platforms of optical data storage [29]. TPP lithography is also an ideal tool for developing nanomaterials/polymer composite based micro/nano-structures.…”

Section: Introductionmentioning

confidence: 99%

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

Ushiba

Shoji

Masui

et al. 2013

Carbon

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Please cite this article as: Ushiba, S., Shoji, S., Masui, K., Kuray, P., Kono, J., Kawata, S., 3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography, Carbon (2013), doi: http://dx.doi.org/10. 1016/j.carbon.2013.03.020 This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. AbstractWe present a method to develop single-wall carbon nanotube (SWCNT)/polymer composites into arbitrary three-dimensional micro/nano structures. Our approach, based on two-photon polymerization lithography, allows one to fabricate three-dimensional SWCNT/polymer composites with a minimum spatial resolution of a few hundreds nm. A near-infrared femtosecond pulsed laser beam was focused onto a SWCNT-dispersed photo resin, and the laser light solidified a nanometric volume of the resin. The focus spot was three-dimensionally scanned, resulting in the fabrication of arbitrary shapes of SWCNT/polymer composites.SWCNTs were uniformly distributed throughout the whole structures, even in a few hundreds nm thick nanowires. Furthermore, we also found an intriguing phenomenon that SWCNTs were self-aligned in polymer nanostructures, promising improvements in mechanical and electrical properties. Our method has great potential to open up a wide range of applications such as micro-and nanoelectromechanical systems, micro/nano actuators, sensors, and photonics devices based on CNTs. Main Text

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“…The exceptional characteristics of TPP that enable 3D rapid prototyping with nanometric fabrication resolution have been extensively applied to fabricate microoptical components [64], photonic crystals [58,65,66], micro-and nanosystems [67][68][69], microfluidic devices [70][71][72], medical devices [73], and scaffold for tissue engineering [64,73,75]. Figure 10 shows examples of 3D micro-and nanostructures fabricated using TPP: (a) a 2 × 2 array of planoconvex microlens [64], (b) a photonic bandgap crystal [66], (c) a microturbine that is rotated by application of an external magnetic field [69], (d) fluid-mixing components integrated into an open microfluidic channel [72], (e) a microvalve designed to prevent reflux of blood flow in human veins [73], and (f) a 25-µm pore-sized scaffold for 3D cell migration studies [75].…”

Section: Applicationsmentioning

confidence: 99%

Progress in ultrafast laser processing and future prospects

Sugioka

2017

Nanophotonics

169

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Abstract:The unique characteristics of ultrafast lasers have rapidly revolutionized materials processing after their first demonstration in 1987. The ultrashort pulse width of the laser suppresses heat diffusion to the surroundings of the processed region, which minimizes the formation of a heat-affected zone and thereby enables ultrahigh precision micro-and nanofabrication of various materials. In addition, the extremely high peak intensity can induce nonlinear multiphoton absorption, which extends the diversity of materials that can be processed to transparent materials such as glass. Nonlinear multiphoton absorption enables three-dimensional (3D) micro-and nanofabrication by irradiation with tightly focused femtosecond laser pulses inside transparent materials. Thus, ultrafast lasers are currently widely used for both fundamental research and practical applications. This review presents progress in ultrafast laser processing, including micromachining, surface micro-and nanostructuring, nanoablation, and 3D and volume processing. Advanced technologies that promise to enhance the performance of ultrafast laser processing, such as hybrid additive and subtractive processing, and shaped beam processing are discussed. Commercial and industrial applications of ultrafast laser processing are also introduced. Finally, future prospects of the technology are given with a summary.

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Optically driven micropump produced by three-dimensional two-photon microfabrication

Cited by 225 publications

References 18 publications

Recent advances in microscale pumping technologies: a review and evaluation

Recent advances in microscale pumping technologies: a review and evaluation

3D microfabrication of single-wall carbon nanotube/polymer composites by two-photon polymerization lithography

Progress in ultrafast laser processing and future prospects

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