2021
DOI: 10.1016/j.rio.2021.100060
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Optical waveguides fabricated in atomic layer deposited Al2O3 by ultrafast laser ablation

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Cited by 5 publications
(4 citation statements)
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“…The resultant AAO membranes are then pore-widened using 5 wt % phosphoric acid at 30 °C to reach the desired pore diameters, and the effect of porewidening times on the aspect of the pores (pore ellipticity) is investigated, as shown in Figure 5. Figure 5b−e,g−j presents the SEM images of the AAO membranes with different porewidening times (1,3,5,10,15,20,30, and 40 min) at locations 1 mm away from the cracking points. It can be seen that the sizes of the pores gradually increase with longer pore-widening times, as plotted in Figure S10.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
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“…The resultant AAO membranes are then pore-widened using 5 wt % phosphoric acid at 30 °C to reach the desired pore diameters, and the effect of porewidening times on the aspect of the pores (pore ellipticity) is investigated, as shown in Figure 5. Figure 5b−e,g−j presents the SEM images of the AAO membranes with different porewidening times (1,3,5,10,15,20,30, and 40 min) at locations 1 mm away from the cracking points. It can be seen that the sizes of the pores gradually increase with longer pore-widening times, as plotted in Figure S10.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…AAO membranes have gained attention because of their outstanding chemical, thermal, and mechanical stability, as well as excellent biocompatibility. They possess uniform and well-controlled nanopore distribution, exhibiting characteristics such as precise pore sizes and spacings. , The ordered arrangement of pores allows for consistent and repeatable nanoscale manufacturing, ensuring uniformity and control of the final products. Moreover, the pore sizes and lengths can be modulated by adjusting the anodizing parameters, such as electrolyte, concentration, temperature, and applied voltage. , The versatile nature of the AAO membranes makes them valuable templates for creating various nanoscale structures and facilitates their integration with other materials or devices. Furthermore, AAO membranes find numerous applications in drug delivery, membrane filtration, and catalysis, highlighting their multifunctionality in various fields. …”
Section: Introductionmentioning
confidence: 99%
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“…The properties of the surface can also be enhanced by oxidation of the surface of metal along with the creation of surface structures. Pulsed laser ablation of target surface in O 2 environment is well known method for oxidation of the target surface to produce oxides of Al (AlO, Al 2 O 3 ) [25][26][27]. The aim behind the modification of surface and structural properties of Al after pulsed laser ablation in Ar and O 2 is to modify broad range functional as well as physical and chemical characteristics.…”
Section: Introductionmentioning
confidence: 99%