Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

Peña‐Rodríguez, Ovidio; Olivares, J.; Carrascosa, M.; Garcı́a-Cabañes, A.; Rivera, Antonio; Agulló‐López, F.

doi:10.5772/35265

Cited by 11 publications

(5 citation statements)

References 233 publications

(232 reference statements)

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“…Ion irradiation has been extensively studied for the fabrication and modification of materials and nanostructures and is an industrial method in mainstream microelectronics industries. Amongst the many applications, an example is the use of swift heavy ions (SHIs) for the formation of optical waveguides in insulating materials, such as amorphous SiO 2 and Si 3 N 4 , as detrimental effects are significantly reduced in comparison to low-energy ion implantation [1]. At high ion energies, processes are predominantly based on the interaction of the ions with the electrons in the material as the interaction cross-section for nuclear collisions dramatically decreases with increasing ion energy.…”

Section: Introductionmentioning

confidence: 99%

Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

et al. 2018

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The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN :H and SiO :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN :H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiO :H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.

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Section: Introductionmentioning

confidence: 99%

Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

et al. 2018

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“…Initial irradiation with 3 Â 10 14 ions=cm 2 12 MeV carbon ions/cm 2 produces two regions of damage, namely, a heavy damaged region due to the interaction between the carbon ions and the electron cloud of the crystal (electronic damage), and a damaged region further into the crystal due to the ballistic interaction between the ions and the atoms in the crystal (nuclear damage). 16 In the particular case of this work, the electronic interaction, given by the stopping force, is two orders of magnitude higher than the nuclear damage (see Fig. 1), and no significant contribution of the nuclear damage has been found in previous research.…”

Section: A After Irradiationmentioning

confidence: 45%

High-temperature recrystallization effects in swift heavy ion irradiated KY(WO4)2

Frentrop

Tormo-Márquez

Segerink

et al. 2021

Journal of Applied Physics

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KY(WO 4 ) 2 crystal has a lot of potential as an on-chip waveguide material for lanthanide ion-doped, Raman active lasers and on-chip amplifiers. One method of fabricating these waveguides is by using swift carbon ion irradiation, which produces a step-like, damageinduced refractive index contrast of up to Δn % 0.2. The irradiation is followed by an annealing step to reduce color centers that cause high optical absorption, leading to an optical slab waveguide with optical transmission losses as low as 1.5 dB/cm at 1550 nm. In this article, we report an upper limit of 450 C to the annealing temperature, above which stresses and recrystallization induce additional scattering detrimental to waveguide performance. The effects are characterized using transmission electron microscopy and Raman microscopy.

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“…Material structure and performance can be enhanced or degraded through the reorganization of surfaces, the implantation of chemical species, or the creation of defects depending on the ion species, energy, angle, etc., leading to sputtering, 1,2 accumulation of defects, phase changes, 3 morphological changes, surface structures, 4,5 inducing nanostructures on polymers, 6 semiconductors, 7 and metals. 8 Ion beams can also be used for implantation, 9 waveguide formation, 10 functionalization of interfaces and surfaces, or emulation of exposure to extreme radiation environments, such as outer space or nuclear reactors. [11][12][13][14] Post-irradiation examination (PIE) is typically conducted to examine the impact of irradiation on materials.…”

Section: Introductionmentioning

confidence: 99%

The In Situ Ion Irradiation Toolbox: Time-Resolved Structure and Property Measurements

Lang

Dennett

Madden

et al. 2021

JOM

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The dynamic interactions of ions with matter drive a host of complex evolution mechanisms, requiring monitoring on short spatial and temporal scales to gain a full picture of a material response. Understanding the evolution of materials under ion irradiation and displacement damage is vital for many fields, including semiconductor processing, nuclear reactors, and space systems. Despite materials in service having a dynamic response to radiation damage, typical characterization is performed post-irradiation, washing out all information from transient processes. Characterizing active processes in situ during irradiation allows the mechanisms at play during the dynamic ion-material interaction process to be deciphered. In this review, we examine the in situ characterization techniques utilized for examining material structure, composition, and property evolution under ion irradiation. Covering analyses of microstructure, surface composition, and material properties, this work offers a perspective on the recent advances in methods for in situ monitoring of materials under ion irradiation, including a future outlook examining the role of complementary and combined characterization techniques in understanding dynamic materials evolution.

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Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

Cited by 11 publications

References 233 publications

Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

High-temperature recrystallization effects in swift heavy ion irradiated KY(WO4)2

The In Situ Ion Irradiation Toolbox: Time-Resolved Structure and Property Measurements

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