2003
DOI: 10.1063/1.1555272
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Optical transmission measurements of explosive boiling and liftoff of a layer of micron-scale water droplets from a KrF laser-heated Si substrate

Abstract: Water plume velocities were measured in air by optical transmission as a function of laser fluence using a KrF laser for explosive boiling and liftoff of a layer of micron-scale water droplets from a laser-heated Si substrate of interest for laser particle removal. The thickness of the superheated water layer near the water/Si interface determines acceleration and removal of the water droplets from the Si substrate.

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Cited by 26 publications
(27 citation statements)
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“…The contact angle of the droplet on a nanostructured substrate appeared to follow typical electrowetting behavior [3,11,14] with the cos u proportional to V 2 (see Figure 4). However, it showed no saturation for the whole range of investigated voltages in contrast to a rapid saturation on an identically treated planar substrate (see Figure 4).…”
Section: Introductionmentioning
confidence: 95%
“…The contact angle of the droplet on a nanostructured substrate appeared to follow typical electrowetting behavior [3,11,14] with the cos u proportional to V 2 (see Figure 4). However, it showed no saturation for the whole range of investigated voltages in contrast to a rapid saturation on an identically treated planar substrate (see Figure 4).…”
Section: Introductionmentioning
confidence: 95%
“…Similarly, small clusters of alumina particles of radii R ¼ 0.3-1 mm (Buehler micro-polish) were deposited in the same way on similar Si wafers. An ETM dosing system described elsewhere (Kudryashov & Allen, 2003, 2004a) was used to deposit 3-6 cm wide (depending on the dosing time, t dose ) ETM layers on the Si substrates mounted on a three-dimensional stage. ETM dosing was achieved by using pressurized N 2 gas with a triggered valve connected to a bubbler immersed in a flask with preheated ETM.…”
Section: Methodsmentioning
confidence: 99%
“…The transient multi-MPa pressure of the superheated ETM may be applied underneath the contaminant particles as a ''vapor piston'' force (Lu et al, 1999(Lu et al, , 2000Zheng et al, 2001), while the lifting-off ETM also exerts a viscous ''drag'' force on the particles (Kudryashov & Allen, 2002b, 2005. Lift-off distances for submm ETM layers may approach sub-mm magnitudes (Kudryashov & Allen, 2003, 2004b, enabling the removal of contaminant particles sufficiently far away from the substrate to prevent redeposition irrespective of their size. Importantly, F B , being a function of the ETM, and related steam laser cleaning threshold, F SLC , are usually much lower than DLC thresholds for sub-100 nm model particle contaminants ( Figure 1).…”
Section: Introductionmentioning
confidence: 99%
“…During superheating, if the superhot layer is irradiated by a high-power short-pulsed laser and its temperature reaches the bronze bond thermodynamic critical temperature 0.90T tc (T tc is the bronze thermodynamic critical temperature), there will be a large outbreak of nucleation. If, at this time, there are disturbances, a more violent phase explosion phenomenon will occur [11,[13][14][15][16][17]. During the grinding wheel laser dressing process, the existence of a super-hot layer will lead to the occurrence of a phase explosion.…”
Section: After the Bronze Bond Is Meltedmentioning
confidence: 99%