2016
DOI: 10.1002/vipr.201600608
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Optical spectrometry in the diagnosis of ion‐plasma processes

Abstract: At the present stage of progress the development of ion‐plasma technological devices requires the use of express analysis of the generated plasma flux composition. Spectrometric equipment which can be embedded into the technological process to determine the composition of the gas mixture and to analyze the emission spectra of low temperature plasma generated by magnetron sputtering systems and vacuum arc sources is presented. The method of spectral interferometry that allows to control thickness and refractive… Show more

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Cited by 20 publications
(5 citation statements)
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“…In this case, the influence of pulse frequency on the spectrum curves, as well as the presence of obvious impurities (potassium permanganate in particular) was considered. The spectrometer ISM3600 [6,7] with 2 s accumulation time setting was used. The software processing of the obtained spectra was carried out with the ASpect2010 software [8].…”
Section: Application Of the Glow Discharge Control Device In The Expementioning
confidence: 99%
“…In this case, the influence of pulse frequency on the spectrum curves, as well as the presence of obvious impurities (potassium permanganate in particular) was considered. The spectrometer ISM3600 [6,7] with 2 s accumulation time setting was used. The software processing of the obtained spectra was carried out with the ASpect2010 software [8].…”
Section: Application Of the Glow Discharge Control Device In The Expementioning
confidence: 99%
“…In addition, this method gives the average value of the coating thickness across the object. Also only for dielectric and semiconductor films can be applied becoming increasingly common spectrometric measurement method [10,11].…”
Section: Related Contentmentioning
confidence: 99%
“…For the determination of the plasma flux composition an emission spectral analyzer on the basis of a modernized one dimensional CCD array Toshiba TCD1304 with 3648 pixels (8×200 μm) was used [10][11][12]. The investigated range of wavelengths of the plasma was 350…950 nm (optical resolution of the spectrometer is 1 nm).…”
Section: Spectral Analysis Of the Charge And Elemental Composition Ofmentioning
confidence: 99%