Optical proximity correction for a versatile LCD based direct write maskless photoplotter

Simple maskless lithography tool with a desk-top size using a liquid-crystal-display projector

“…Similar exposure systems were also proposed by other research groups [8][9][10][11][12][13]. On the other hand, many researches on exposure systems using digital micromirror devices (DMDs) instead of LCD panels were also reported [14][15][16][17][18][19].…”

Optical Proximity Corrections for Digital Micromirror Device-based Maskless Lithography

“…Redundancy, a new parameter defined as the number of writing times is derived from analyzing the pattern writing scheme of a DMD-based maskless lithography system, and applied to controlling light transmission. Compared to the traditional works [19,20] which present only a feasibility study by a numerical simulation, the proposed method is based on a substrate scanning manner encouraging an attempt to a mass production, and the experiment using the industrial DMD-based maskless system confirms that this method is promising for minimizing a corner-rounding effect.…”

“…OPCs in conventional photolithography generally target image errors in nanoscale patterns caused by diffraction and employ the mask shapes to compensate for these image errors [17,18]. On the other hand, in DMD-based maskless lithography, OPCs target image distortions in each microscale beam projected by mirror devices and the dose distribution produced by an accumulation of projected beam images [19,20]. This difference is the reason that our study focuses on controlling the modulation of the spatial light by using micromirrors in order to achieve desired features in a microscale pattern.…”

Pattern Width Homogenization in the Field of Liquid-Crystal-Display Matrix Exposure by Adjusting Each Cell Transmittance

“…Therefore, maskless lithography systems are preferred, and various exposure systems using liquid-crystal-display (LCD) panels in place of reticles have been proposed [1][2][3][4][5][6][7]. The authors also developed several systems in the past researches [8][9][10][11][12][13][14], and recently, proposed a very low-cost exposure system using a commercial LCD projector as it was [15].…”