Optical properties of V-groove silicon nitride trench waveguides

Zhao, Qiancheng; Huang, Yuewang; Boyraz, Özdal

doi:10.1364/josaa.33.001851

Cited by 5 publications

(1 citation statement)

References 38 publications

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“…It is expected that the V-groove waveguide and SCW can achieve better loss performance compared with the strip waveguide. The fabrication of the strip waveguide has been reported in many works [30,31], and the structure of SCW can be fabricated applying the method of high resolution lithography [32,33]. There has been work reporting the experimentally realizing V-groove waveguide, but it is hard to fabricate this kind of structure at the feature size as small as ∼100 nm [34,35].…”

Section: Geometry and Materials Of The Waveguidementioning

confidence: 99%

Dual-working mode device based on dual-element photonic crystal-stepped concave waveguide

Li¹,

Wang²,

Chen³

et al. 2022

J. Opt.

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In this study, a Si3N4 on insulator device used for photonic integrated chips (PICs) is proposed. The dual-working mode device is constructed using a racetrack microring resonator, which is established using a dual-period photonic crystal-stepped concave waveguide (DPCSCW). A novel scheme of dual-working modes is realized, and sensing and filtering are performed simultaneously without interference. The results show that a sensitivity of 558.6 nm/RIU and quality factor of 5795.24 were obtained for the sensor mode. An extinction of 58 dB and bandwidth of up to 335 nm were achieved in the filter mode. The footprint of the entire device is within 20 μm×11 μm, which is ultra-compact and suitable for PICs.

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Section: Geometry and Materials Of The Waveguidementioning

confidence: 99%

Dual-working mode device based on dual-element photonic crystal-stepped concave waveguide

Li¹,

Wang²,

Chen³

et al. 2022

J. Opt.

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Enhancing and confining light in hybrid plasmonic nanowire-integrated V-groove silicon waveguides

Zhao,

2024

Discov Appl Sci

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In recent years, the field of dielectric-plasmonic photonics has made remarkable strides, leading to the successful development of various technologies. The realization of sophisticated optical circuits on a single platform has become increasingly viable. Here we propose and investigate a hybrid dielectric waveguide integrated with plasmonics. This hybrid optical waveguide comprises a copper nanowire situated in close proximity to a silicon V-groove channel, separated by a nanoscale gap. This configuration is particularly advantageous, as achieving precise alignment of the nanowire within the V-groove addresses a fundamental challenge in engineering a fully functional integrated component. Additionally, a silicon nitride film coats the V-groove. Utilizing finite element analysis, we conduct numerical simulations to analyze field properties and modal propagation at a specific wavelength of 1550 nm. Our simulations reveal that meticulous optimization of the nanowire and V-groove channel’s geometrical parameters enables effective tailoring of the hybrid mode. This optimization results in strong mode coupling between the dielectric waveguide mode and the surface plasmon, leading to substantial field enhancement, confinement, and extended propagation length. These waveguides also hold promise for sensing applications, facilitating the detection of sample variations and locations due to pronounced mode characteristics. The proposed hybrid approach demonstrates potential for integration into high-level photonic circuits and on-chip optical computing systems.

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CMOS-Compatible Silicon Etched U-Grooves With Groove-First Fabrication for Nanophotonic Applications

Wang

Liu

Chen

et al. 2022

IEEE Photon. Technol. Lett.

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Optical properties of V-groove silicon nitride trench waveguides

Cited by 5 publications

References 38 publications

Dual-working mode device based on dual-element photonic crystal-stepped concave waveguide

Dual-working mode device based on dual-element photonic crystal-stepped concave waveguide

Enhancing and confining light in hybrid plasmonic nanowire-integrated V-groove silicon waveguides

CMOS-Compatible Silicon Etched U-Grooves With Groove-First Fabrication for Nanophotonic Applications

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