2023
DOI: 10.2139/ssrn.4446510
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Optical Properties of Plasmonic Titanium Nitride Thin Films from Ultraviolet to Mid-Infrared Wavelengths Deposited by Pulsed-Dc Sputtering, Thermal and Plasma-Enhanced Atomic Layer Deposition

Leonid Yu. Beliaev1,
Evgeniy Shkondin
2
,
Andrei V. Lavrinenko3
et al.
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