Optical planar and ridge waveguides in terbium scandium aluminum garnet crystal fabricated by ion implantation and precise diamond blade dicing

Zhang, Jie; Chen, Jingyi; Lu, Yan; Wang, Yu-Song; Zhang, Liao-Lin; Yue, Qing-Yang; Zheng, Ruilin; Liu, Chunxiao

doi:10.1016/j.vacuum.2021.110493

Cited by 12 publications

(3 citation statements)

References 28 publications

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“…With vertical optical confinement provided by the ion-induced change in refractive index and lateral optical confinement offered by two neighboring grooves, ridge waveguides with widths of 10 µm (WG1), 20 µm (WG2), 25 µm (WG3), and 30 µm (WG4) were formed. Both irradiation and precise diamond blade dicing are high-precision and repeatable waveguide construction techniques, [35][36][37] so that the waveguides are constructed with good stability. After fabrication, micro-Raman measurements were carried out using a spectrometer (Horiba/Jobin Yvon HR800) to investigate the microstructural modification of Nd:GdCOB crystal.…”

Section: Methodsmentioning

confidence: 99%

Second harmonic generation from precise diamond blade diced ridge waveguides

Pang

et al. 2022

Chinese Phys. B

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In this work, carbon ion irradiation and precise diamond blade dicing are applied for Nd:GdCOB ridge waveguide fabrication. The propagation properties of the fabricated Nd:GdCOB waveguides are investigated through experiments and theoretical analysis. The micro-Raman analysis reveals that the lattice of Nd:GdCOB crystal expands during the irradiation process. The micro-second harmonic spectroscopic analysis suggests that the original nonlinear properties of the Nd:GdCOB crystal are greatly enhanced within the waveguide volume. Under a pulsed 1064-nm laser pumping, second harmonic generation (SHG) at 532 nm have been achieved in the fabricated waveguides. The maximum SHG conversion efficiencies are determined to be ~8.32%W-1 and ~22.36%W-1 for planar and ridge waveguides, respectively.

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Section: Methodsmentioning

confidence: 99%

Second harmonic generation from precise diamond blade diced ridge waveguides

Pang

et al. 2022

Chinese Phys. B

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“…16 In general, it can only realize a one-dimensional (1D) waveguide. 17 Fortunately, 1D waveguides fabricated by the IIPT can be upgraded to 2D structures by precision diamond blade dicing, 18 chemical wet etching, 19 femtosecond (FS) ablation 20 and so on. The FS ablation can realize complex 3D structures in transparent dielectric materials.…”

Section: Introductionmentioning

confidence: 99%

Optical ridge waveguides in Nd³⁺‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Liu,

Lu,

Sun

et al. 2023

Micro & Optical Tech Letters

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In this work, the ridge waveguide was formed by the femtosecond laser ablation with a central wavelength of 0.808 μm and a speed of 50 μm/s on the planar Nd3+‐doped fluorophosphate glass waveguide that was fabricated by the C3+ ion implantation with an energy of 6.0 MeV and a fluence of 1.0×1012 C3+s/mm2. The mechanism of the ion‐implanted waveguide was discussed by the Stopping and Range of Ions in Matter 2013. The cross‐section morphology of the ridge waveguide was captured by an optical microscope. Its mode characteristics were analyzed by the end‐face coupling method. The ridge Nd3+‐doped fluorophosphate glass waveguides have potential as fundamental structures for many optoelectronic devices including waveguide amplifiers and lasers.

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“…[17] Owing to the high Mohs hardness of the diamond blade, the diamond blade with a fast rotation can dice long grooves on the surface of the planar waveguide. [18] The part between two parallel adjacent grooves is the ridge waveguide.…”

Section: Introductionmentioning

confidence: 99%

Optical properties of He⁺-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

You¹,

Wang²,

Wang³

et al. 2022

Chinese Phys. B

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TGG crystal can be used to fabricate various magneto-optical devices, due to its optimum Faraday Effect. In this work, 400-keV He+ ions with a fluence of 6.0 × 1016 ions/cm2 were irradiated into the TGG crystal for the planar waveguide formation. The precise diamond blade dicing with the rotation speed of 20,000 rpm and the cutting velocity of 0.1 mm/s was performed on the He+-implanted TGG planar waveguide for the ridge structure. The dark-mode spectrum of the He+-implanted TGG planar waveguide was measured by the prism-coupling method, obtaining the relationship between the reflected light intensity and the effective refractive index. The refractive index profile of the planar waveguide was reconstructed by the reflectivity calculation method. The near-field light intensity distributions of the planar and ridge waveguides were recorded by the end-face coupling method. The He+-implanted and diamond blade-diced TGG crystal planar and ridge waveguides are promising candidates for integrated magneto-optical devices.

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Optical planar and ridge waveguides in terbium scandium aluminum garnet crystal fabricated by ion implantation and precise diamond blade dicing

Cited by 12 publications

References 28 publications

Second harmonic generation from precise diamond blade diced ridge waveguides

Second harmonic generation from precise diamond blade diced ridge waveguides

Optical ridge waveguides in Nd³⁺‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Optical properties of He⁺-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

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Optical planar and ridge waveguides in terbium scandium aluminum garnet crystal fabricated by ion implantation and precise diamond blade dicing

Cited by 12 publications

References 28 publications

Second harmonic generation from precise diamond blade diced ridge waveguides

Second harmonic generation from precise diamond blade diced ridge waveguides

Optical ridge waveguides in Nd3+‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Optical properties of He+-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides

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Product

Resources

About

Optical ridge waveguides in Nd³⁺‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Optical properties of He⁺-implanted and diamond blade-diced terbium gallium garnet crystal planar and ridge waveguides