Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering

Yoo, Byung Woo; Megens, Mischa; Chan, Theodore; Sun, Tao; Yang, Wankou; Chang-Hasnain, Connie J.; Horsley, David A.; Wu, M.C.

doi:10.1364/oe.21.012238

Cited by 70 publications

(42 citation statements)

References 14 publications

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“…While this is good for demonstration of concept, silicon material platform is desirable to scale up the array size. Phased array using HCG as piston mirror has been demonstrated with excellent beam steering performance [91]. For the APF, Si/SiO 2 DBR can be deposited on the Si substrate, followed by the deposition of SiO 2 as sacrificial layer and Si as the HCG layer.…”

Section: Hcg Optical Phased Array On Silicon Platformmentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

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473

171

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Integrated optoelectronics has seen its rapid development in the past decade. From its original primary application in long-haul optical communications and access network, integrated optoelectronics has expanded itself to data center, consumer electronics, energy harness, environmental sensing, biological and medical imaging, industry manufacture control etc. This revolutionary progress benefits from the advancement in light generation, manipulation, detection and its interaction with other systems. Device innovation is the key in this advancement. Together they build up the component library for integrated optoelectronics, which facilities the system integration.High contrast grating (HCG) is an emerging element in integrated optoelectronics. Compared to the other elements, HCG has very rich properties and design flexibility. Some of them are fascinating and extraordinary, such as broadband high reflectivity, and high quality factor resonance -all it needs is a single thin-layer of HCG. Furthermore, it can be a microelectromechanical structure. These rich properties are readily to be harnessed and turned into novel devices.This dissertation is devoted to investigate the physical origins of the extraordinary features of HCG, and explore its applications in novel devices for integrated optoelectronics. An intuitive picture will be presented to explain the HCG physics. The essence of HCG lies in its superb manipulation of light, which can be coupled to applications in light generation and detection. Various device innovations, such as lowloss hollow-core waveguide, fast optical phased array, tunable VCSEL and detector are demonstrated with the HCG as a key element. This breadth of functionality of HCG suggests that HCG has reached beyond a single element in integrated optoelectronics; it has enabled a new platform for integrated optoelectronics.

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Section: Hcg Optical Phased Array On Silicon Platformmentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

Self Cite

473

171

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“…To reduce the mirror mass and increase the actuation speed, we used a novel high-contrast grating (HCG) [22]. The HCG mirrors consist of a thin layer of silicon (∼300 nm) structured with beam and void to form a sub-wavelength grating as presented in Figure 8b.…”

Section: Phase Modulation Memsmentioning

confidence: 99%

Diffraction-Based Optical Switching with MEMS

et al. 2017

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Abstract:We are presenting an overview of MEMS-based (Micro-Electro-Mechanical System) optical switch technology starting from the reflective two-dimensional (2D) and three-dimensional (3D) MEMS implementations. To further increase the speed of the MEMS from these devices, the mirror size needs to be reduced. Small mirror size prevents efficient reflection but favors a diffraction-based approach. Two implementations have been demonstrated, one using the Texas Instruments DLP (Digital Light Processing), and the other an LCoS-based (Liquid Crystal on Silicon) SLM (Spatial Light Modulator). These switches demonstrated the benefit of diffraction, by independently achieving high speed, efficiency, and high number of ports. We also demonstrated for the first time that PSK (Phase Shift Keying) modulation format can be used with diffraction-based devices. To be truly effective in diffraction mode, the MEMS pixels should modulate the phase of the incident light. We are presenting our past and current efforts to manufacture a new type of MEMS where the pixels are moving in the vertical direction. The original structure is a 32 × 32 phase modulator array with high contrast grating pixels, and we are introducing a new sub-wavelength linear array capable of a 310 kHz modulation rate.

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“…Although OPAs based on thermo-optic phase shifters have been demonstrated [9], the large thermal time constant associated with these phase shifters limits the maximum beam steering rate. MEMS based phase shifters enable the realization of arrays with large fill-factors [10]. However, their large mechanical time constant presents a practical challenge in utilizing them for OPA based projection systems.…”

Section: Integrated Optical Phased Arraysmentioning

confidence: 99%

Nanophotonic projection system

et al. 2015

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Low-power integrated projection technology can play a key role in development of low-cost mobile devices with built-in high-resolution projectors. Low-cost 3D imaging and holography systems are also among applications of such a technology. In this paper, an integrated projection system based on a two-dimensional optical phased array with fast beam steering capability is reported. Forward biased p-i-n phase modulators with 200MHz bandwidth are used per each array element for rapid phase control. An optimization algorithm is implemented to compensate for the phase dependent attenuation of the p-i-n modulators. Using rapid vector scanning technique, images were formed and recorded within a single snapshot of the IR camera.

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Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering

Cited by 70 publications

References 14 publications

High-contrast gratings for integrated optoelectronics

High-contrast gratings for integrated optoelectronics

Diffraction-Based Optical Switching with MEMS

Nanophotonic projection system

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