1996
DOI: 10.1049/el:19961211
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Optical path length trimming technique using thin film heaters for silica-based waveguides on Si

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Cited by 18 publications
(1 citation statement)
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“…Thin film heaters are formed over MZI arms for frequency tracking and phase trimming [8] and connected to wire bonding pads at the edge of the chip by Au electrodes.…”
Section: Chip Layoutmentioning
confidence: 99%
“…Thin film heaters are formed over MZI arms for frequency tracking and phase trimming [8] and connected to wire bonding pads at the edge of the chip by Au electrodes.…”
Section: Chip Layoutmentioning
confidence: 99%