Optical Nanofabrication of Concave Microlens Arrays

Liu, Xueqing; Lei, Yu; Yang, Shuman; Chen, Qi‐Dai; Wang, Lei; Juodkazis, Saulius; Sun, Hong–Bo

doi:10.1002/lpor.201800272

Cited by 76 publications

(38 citation statements)

References 37 publications

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“…For an optical device, the surface roughness is a very important parameter that influences the optical performance. With high surface energy, the wrinkles and particles that are induced by laser ablation can be rapidly removed by dry etching [ 43 , 44 ]. So, the dry etching process was introduced to reduce the surface roughness of the microstructures that were fabricated by laser interference.…”

Section: Resultsmentioning

confidence: 99%

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

et al. 2020

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Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality.

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Section: Resultsmentioning

confidence: 99%

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

et al. 2020

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“…Similar to FLWE, the microfabrication of MLAs by femtosecond laser dry etching (FLDE) technique also consists of two steps. [133,134] Liu et al fabricated microlenses with controllable diameter and sag height by this method. [25] As shown in Figure 9c, the silicon substrate was irradiated by the focused laser beam to form an array of ablated craters.…”

Section: Femtosecond Laser Wet Etching Technique (Flwe) Techniquementioning

confidence: 99%

Bioinspired Artificial Compound Eyes: Characteristic, Fabrication, and Application

Yang

Bian

et al. 2021

Adv Materials Technologies

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the visual nerve perception. This type of eyes has ultrahigh resolution, which can get clear image information. Inspired by this imaging system, people have put significant efforts over a long time for development of camera-related optical system for various applications, such as endoscope, digital camera, smartphones, robot eyes, visual implants. [7][8][9][10] Because of the rapid progress in micro/nano technologies, the artificial eyes structures can achieve extremely high resolution that is close to or even exceeding the human eye. However, the low field of view (FOV) (the maximum value is only 90°) hinders its wider applications. To solve this problem, multiple cameras need to be put together to work, which not only increases the cost, but also makes the entire optical system cumbersome. Hence, an optical device with portable, integrated, and large FOV features is highly desired.Different from the single-lens eyes, the insect eyes adopt another visual system. Figure 1b shows a honeybee's apposition compound eye, which has thousands of ommatidia arranged on a curved surface so that each ommatidium points in different directions. [11] Each unit consists of a lens, a crystalline cone, and a rhabdom. The focused light signal is transmitted to the photosensitive area by the crystalline cone, and then visual perception is generated after passing through the rhabdom. Each of the ommatidium can image which enables the insects to obtain sufficient information in a complex environment and exhibits the characteristics of large FOV, low aberration, and high sensitivity to moving objects. [12] In addition to the honeybee's compound eyes, the eyes of other insects in nature, such as mosquito eye, [13] fly's eye, [14] moth's eye, [15] and dragonfly's eye [16] also have similar structure and have attracted much attention due to the deep research on bionics. [4,9,12,[17][18][19][20][21] The characteristics of the compound eyes in nature and the advanced micro/nano-processing technologies provide great technical support and inspiration for the researchers to prepare artificial compound eyes (ACEs) with close-packed microlens arrays (MLAs) as optical imaging elements. [22][23][24][25][26][27][28][29][30] Such MLAs compose of microscale lenses with the same surface feature and the regular arrangements are important microoptical components. The great light field (LF) regulation and focusing abilities of MLAs have made it essentially in various applications such as imaging, [31][32][33][34][35][36][37][38][39] dynamic target capture, [40][41][42] beaming homogenizing, [43][44][45][46] sensing, [47][48][49] light extractionThe natural compound eyes provide great inspiration for design of advanced imaging devices. Artificial compound eyes (ACEs) with close-packed microlens arrays (MLAs) have attracted enormous research interests due to their remarkable advantages in modern micro-optical systems, such as miniaturization, high integration, tunable focal length, large field of view, and moving objects tracking. Over a decade of intens...

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“…While IBE can etch almost any materials by physical bombardment of argon plasma with high surface smoothness. They demonstrated the fabrication of concave microlens arrays on fused silica, GaAs, SiC and diamond, indicating the ion-beam-etching assisted femtosecond laser modification is a versatile method for nanofabrication of hard materials 101 .…”

Section: Dry-etching-assisted Femtosecond Laser Modificationmentioning

confidence: 99%

Etching-assisted femtosecond laser modification of hard materials

Liu

Bai

Chen

et al. 2019

Opto-Electronic Advances

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With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard materials. However, the low efficiency, low precision and high surface roughness are the main stumbling blocks for femtosecond laser processing of hard materials. So far, etching-assisted femtosecond laser modification has demonstrated to be the efficient strategy to solve the above problems when processing hard materials, including wet etching and dry etching. In this review, femtosecond laser modification that would influence the etching selectivity is introduced. The fundamental and recent applications of the two kinds of etching assisted femtosecond laser modification technologies are summarized. In addition, the challenges and application prospects of these technologies are discussed.

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Optical Nanofabrication of Concave Microlens Arrays

Cited by 76 publications

References 37 publications

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Bioinspired Artificial Compound Eyes: Characteristic, Fabrication, and Application

Etching-assisted femtosecond laser modification of hard materials

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