2010
DOI: 10.1117/12.854596
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Optical modeling of needle like silicon surfaces produced by an ICP-RIE process

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Cited by 32 publications
(24 citation statements)
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“…The surface texture consists of densely packed needle-like peaks and pits of irregular shape and high aspect ratios (see Figure 2A). Since these features are of subwavelength dimensions the surface can be treated as an effective medium with a smooth varying refractive index n [8,9]. This specific property results in an almost complete suppression of the reflectivity over a broad spectral range making it far more effective than conventional ARCs.…”
Section: Scattering Structures For Light Trappingmentioning
confidence: 99%
“…The surface texture consists of densely packed needle-like peaks and pits of irregular shape and high aspect ratios (see Figure 2A). Since these features are of subwavelength dimensions the surface can be treated as an effective medium with a smooth varying refractive index n [8,9]. This specific property results in an almost complete suppression of the reflectivity over a broad spectral range making it far more effective than conventional ARCs.…”
Section: Scattering Structures For Light Trappingmentioning
confidence: 99%
“…The extraordinary antireflection and light trapping features of b-Si may be explained by an intuitive picture: On the one hand, the top of the texture consists of frayed tips of deep sub-wavelength dimensions that broaden slowly toward the wafer. Therefore, the surface can be treated as an effective medium with a smooth varying refractive index resulting in negligible back reflection, even for quasi-omnidirectional light incidence [16,17]. On the other hand, the feature sizes at the bottom of the structure are in the range of a few hundred nanometers, that is, have dimensions of the wavelength of the incoming light.…”
Section: Scattering Structures For Optical Path Enhancementmentioning
confidence: 99%
“…The most widely studied black silicon fabrication techniques are reactive ion etching (RIE) [5,6], and metal-assisted chemical etching (MACE) [3,7,8] and produce textures with the lowest reflectivities.…”
Section: Introductionmentioning
confidence: 99%