2005
DOI: 10.1016/s0007-8506(07)60025-0
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Optical Metrology of Surfaces

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Cited by 118 publications
(81 citation statements)
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“…Scanning probe microscopes (SPMs), microcoordinate measuring machines (microCMMs), and optical measurement systems are major dimensional measurement technologies for nanomanufacturing [87]. In this section, recent accomplishments in measurement technologies are presented as an update of the related past CIRP keynotes [38,94,215].…”
Section: Measurement and Evaluationmentioning
confidence: 99%
“…Scanning probe microscopes (SPMs), microcoordinate measuring machines (microCMMs), and optical measurement systems are major dimensional measurement technologies for nanomanufacturing [87]. In this section, recent accomplishments in measurement technologies are presented as an update of the related past CIRP keynotes [38,94,215].…”
Section: Measurement and Evaluationmentioning
confidence: 99%
“…The measurement area of the optical scanner may vary from 175 x 140 to 2000 x 1600 [mm 2 ] and its declared resolution is 20 µm in all directions (x, y, z). The accuracy of identifying the points depends on the measurement area, the distance between single probing points, the method of measurement responsible for registration of the cloud of points corresponding to the measured object, and on the data processing method [25]. The dimensions of concrete surfaces sometimes exceed 10000 mm and then they can be considered as large scale details.…”
Section: Coordinate Measurement Techniquementioning
confidence: 99%
“…That is why we propose that optical inspection methods, technology enable the use of non-invasive, i.e., not through contact with the surface is completely clean and samples depending on its constitution can be reused [3], [4], [6], [8], [14], and [15]. Since 2009, I have been conducting research in the field of optical metrology and image processing, developing a model for the evaluation of surface roughness in the paper industry, based on texture analysis using co-occurrence matrix of gray levels [23], [24], [25], [26] industrial sectors.…”
Section: Research and Development In Panamamentioning
confidence: 99%