Optical methods for thickness measurements on thin metal films

Pokrowsky, P.

doi:10.1364/ao.30.003228

Cited by 14 publications

(3 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…[1][2][3] Especially, the SPR biosensor is the most advanced and developed optical labelfree biosensor technology. [4] As an important application, some earliest SPR studies were devoted to the determinations of the optical and geometrical constants of thin metal films, and so it has been confirmed that the SPR technique is an accurate and simple method of characterizing thin metal films, [5][6][7][8][9][10][11][12][13][14][15][16] and it is particularly suited for studying thin metal films of a few hundred angstroms in thickness. [5,17,18] In all studies of characterizing thin metal films using SPs, an attenuated total reflection (ATR) prism coupling in the Kretschmann-Raether geometry has been always employed as the method of optical excitation of SPs, and among the four modulation approaches (including modulations in wavelength, angle, amplitude, and phase), angular modulation is the only adopted approach.…”

Section: Introductionmentioning

confidence: 99%

The determination of the thickness and the optical dispersion property of gold film using spectroscopy of a surface plasmon in the frequency domain

Huang¹,

Ye²,

Li³

et al. 2013

Chinese Phys. B

View full text Add to dashboard Cite

We propose to use wavelength modulation approach, i.e., the spectroscopy of a surface plasmon in the frequency domain, to characterize the optical dispersion property of gold film. Using this method, we determine the dispersion relationship of gold film in a wavelength range from 537.12 nm to 905.52 nm, and our results accord well with the reported results by other authors. This method is particularly suited for studying the optical dispersion properties of thin metal films, because a series of dielectric constants over a wide spectral range can be determined simultaneously via only a single scan of the incident angle, thereby avoiding the repeated measurements required when using the angular modulation approach.

show abstract

Section: Introductionmentioning

confidence: 99%

The determination of the thickness and the optical dispersion property of gold film using spectroscopy of a surface plasmon in the frequency domain

Huang¹,

Ye²,

Li³

et al. 2013

Chinese Phys. B

View full text Add to dashboard Cite

show abstract

“…The estimated value of 1 was about −12.8+ i2.7, which is close to reported value. 20 SPR reflectance curve for prism-Au-ZnO-air system is shown ͑symbol͒ in Fig. 2.…”

mentioning

confidence: 99%

Temperature dependent optical properties of (002) oriented ZnO thin film using surface plasmon resonance

Saha

Mehan

Sreenivas

et al. 2009

Applied Physics Letters

View full text Add to dashboard Cite

Temperature dependent optical properties of c-axis oriented ZnO thin film were investigated using surface plasmon resonance (SPR) technique. SPR data for double layer (prism-Au-ZnO-air) and single layer (prism-Au-air) systems were taken over a temperature range (300–525 K). Dielectric constant at optical frequency and real part of refractive index of the ZnO film shows an increase with temperature. The bandgap of the oriented ZnO film was found to decrease with rise in temperature. The work indicates a promising application of the system as a temperature sensor and highlights an efficient scientific tool to study optical properties of thin film under varying ambient conditions.

show abstract

“…Consequently, a technique to characterize a thin metal film needs to be applied. Generally, a lot of SPR-based techniques are available to determine the geometrical and optical constants of thin metal films [ 18 , 19 , 20 ]. For their dispersion characterization, the spectral techniques such ellipsometry [ 21 , 22 , 23 ], reflectometry [ 24 ], and SPR-based reflectometry [ 25 , 26 ] are possible.…”

Section: Introductionmentioning

confidence: 99%

Surface Plasmon Resonance Based Measurement of the Dielectric Function of a Thin Metal Film

Chlebus

Chylek

Ciprián

et al. 2018

Sensors

View full text Add to dashboard Cite

A spectral method based on surface plasmon resonance (SPR) in air is used to measure the dielectric function of a thin metal film. The method utilizes the spectral dependence of the ratio of the reflectances of p- and s-polarized waves measured in the Kretschmann configuration at different angles of incidence. By processing these dependences in the vicinity of a dip, or equivalently near the resonance wavelength, and using the dispersion characteristics of a metal film according to a proposed physical model, the real and imaginary parts of the dielectric function of the metal can be determined. The corresponding dielectric function of the metal is obtained by a least squares method for such a thickness minimizing the difference between the measured and theoretical dependence of the resonance wavelength on the the angle of incidence. The feasibility of the method is demonstrated in measuring the dielectric function of a gold film of an SPR structure comprising an SF10 glass prism and a gold coated SF10 slide with an adhesion film of chromium. The dielectric function according to the Drude–Lorentz model with two additional Lorentzian terms was determined in a wavelength range from 534 to 908 nm, and the results show that the gold film is composed of homogenous and rough layers with thicknesses 42.8 nm and 2.0 nm, respectively. This method is particularly useful in measuring the thickness and dielectric function of a thin metal film of SPR structures, directly in the Kretschmann configuration.

show abstract

Optical methods for thickness measurements on thin metal films

Cited by 14 publications

References 7 publications

The determination of the thickness and the optical dispersion property of gold film using spectroscopy of a surface plasmon in the frequency domain

The determination of the thickness and the optical dispersion property of gold film using spectroscopy of a surface plasmon in the frequency domain

Temperature dependent optical properties of (002) oriented ZnO thin film using surface plasmon resonance

Surface Plasmon Resonance Based Measurement of the Dielectric Function of a Thin Metal Film

Contact Info

Product

Resources

About