2013
DOI: 10.1016/j.ijleo.2013.05.156
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Optical fiber sensor for temperature measurement based on Silicon thermo-optics effect

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Cited by 14 publications
(9 citation statements)
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“…Temperature sensing with this same platform relies on light coupled into noncavity regions of the device, which consist mostly of silicon. Here, the FP resonance peaks shift with temperature because of the positive thermo-optic coefficient of silicon ( 31 ). Tracking temperature is important for the application of bioresorbable FPI pressure sensors as well, as the changes in surrounding temperature induce volumetric changes of the air inside the cavity, thereby adding a temperature-dependent response to the pressure sensor output (see note S3 and fig.…”
Section: Resultsmentioning
confidence: 99%
“…Temperature sensing with this same platform relies on light coupled into noncavity regions of the device, which consist mostly of silicon. Here, the FP resonance peaks shift with temperature because of the positive thermo-optic coefficient of silicon ( 31 ). Tracking temperature is important for the application of bioresorbable FPI pressure sensors as well, as the changes in surrounding temperature induce volumetric changes of the air inside the cavity, thereby adding a temperature-dependent response to the pressure sensor output (see note S3 and fig.…”
Section: Resultsmentioning
confidence: 99%
“…This type of temperature sensor is widely used as a mechanical switch for temperature control, usually, know as thermostats. [10] Few millimeters/minutes 0.1 °C Biomaterial [11,12] Few millimeters/seconds 0.1 °C Gas thermometers [13] Centimeters/minutes 0.001 K Acoustic [14][15][16][17][18] Centimeters/milliseconds 0.1 °C Electrical Thermocouple [19,20] 0.02-5 mm/50 ms-1 min 0.1 °C RTD [20,21] Few millimeters/minutes 0.001 °C Thermistor [13,21] 1-10 mm/20-300 s 0.01 °C (low span, 50 °C) Semiconductor junction [22] Few millimeters/minutes 0.5 °C Optical Optical fiber [23,24] millimeters 1D/millisecond 0.05-0.1 °C Thermoreflectance [25][26][27] 10 μm/down to ms 0.1-1.1 °C Liquid crystal [28][29][30][31] 2D/less than 1 s 0.5-0.9 °C Thermo-and photoluminescence [32][33][34][35] 2D observed temperature fields 1-31 °C Interferometry [36][37][38] 2D/milliseconds or less 2% (temperature in K) IR thermography [39][40][41] 40 μm-1 mm (2D)/down to ms 18 mK Temperature-sensitive paints (TSP) [41] 5 μm-1 mm (2D)/down to ms 0.4 °C 2.1.1.3 Gas thermometers Such mechanical thermometers are based on the variation in the pressure or volume when a fluid changes the temperature [13]. Basically, two types of fluid states are used, gas state or saturated state.…”
Section: Bimaterials Methodsmentioning
confidence: 99%
“…Optical techniques for temperature measurement are a set of emerging techniques that potentialize new applications hardly solved by mechanical or electrical temperature sensors. Their main advantages are noncontact temperature measurements, easy integration for obtaining high-resolution 2D temperature fields, fast response time and high immunity to electromagnetic interference [23][24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41].…”
Section: Optical Temperature Measurement Techniquesmentioning
confidence: 99%
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“…The sensor improved the sensitivity performance for RH and temperature. G. Yixian et al [22] have presented an optical sensor for measuring the temperature, based on the basic principle of Fabry-Perot interferometer. The measurement mechanism found the relation between temperature measurement range and the thickness of single crystal diaphragm.…”
Section: Introductionmentioning
confidence: 99%