Optical emission spectra from microwave oxygen plasma produced by surfatron discharge

Musil, J.; Matouš, Jaroslav; Rajský, A.

doi:10.1007/bf01589738

Cited by 14 publications

(6 citation statements)

References 5 publications

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“…The ionic temperature (300 K) is controlled by a Nosé–Hoover thermostat − in all of our ( NVT ) simulations. The components of an oxygen plasma are an important issue and have been identified experimentally in a pressure range from 3 to 100 GPa as atomic oxygen (O) and charged molecular oxygen (O 2 + ), on which we focus here.…”

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confidence: 99%

“…24 The ionic temperature (300 K) is controlled by a Nose− Hoover thermostat 25−27 in all of our (NVT) simulations. The components of an oxygen plasma are an important issue and have been identified experimentally in a pressure range from 3 to 100 GPa as atomic oxygen (O) and charged molecular oxygen (O 2 + ), 28 on which we focus here. A first set of simulations targeting the approach of O to a perfect graphene surface has shown that O can stick on the surface, forming a stable epoxy form, which is consistent with previous static calculations.…”

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confidence: 99%

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Atom-Scale Reaction Pathways and Free-Energy Landscapes in Oxygen Plasma Etching of Graphene

Koizumi

Boero

Shigeta

et al. 2013

J. Phys. Chem. Lett.

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We report first-principles molecular dynamics calculations combined with rare events sampling techniques that clarify atom-scale mechanisms of oxygen plasma etching of graphene. The obtained reaction pathways and associated free-energy landscapes show that the etching proceeds near vacancies via a two-step mechanism, formation of precursor lactone structures and the subsequent exclusive CO2 desorption. We find that atomic oxygen among the plasma components is most efficient for etching, providing a guidline in tuning the plasma conditions.

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confidence: 99%

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confidence: 99%

Atom-Scale Reaction Pathways and Free-Energy Landscapes in Oxygen Plasma Etching of Graphene

Koizumi

Boero

Shigeta

et al. 2013

J. Phys. Chem. Lett.

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“…The continuous shape of the spectrum is attributed to hot NPs 21,24 and can be compared to black-body radiation to deduce the NP temperature. 21 Simultaneously, the emission lines of hydrogen ͑H a 656.28 nm, H ␤ Balmer͒, 25 atomic oxygen ͑777.53 nm͒, 26 and single-ionized atomic oxygen ͑718.2 nm͒ 27 originate from water dissociation as it was assumed previously. Furthermore, the intense molecular carbon band heads are emphasized.…”

Section: Resultsmentioning

confidence: 91%

Ta[sub 2]O[sub 5] Crystalline Nanoparticle Synthesis by DC Anodic Arc in Water

Delaportas

Svarnas

Alexandrou³

2010

J. Electrochem. Soc.

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In the present study, Ta 2 O 5 crystalline nanoparticles are produced in an appreciable volume using a quite simple anodic arcdischarge in the water system supplied with moderate dc power ͑Ͻ1 kW͒. To the best of our knowledge, these nanoparticles of high technological interest are for the first time produced by such gas-phase method. The system is characterized in real-time, during the nanoparticle formation, by electrical measurements, optical emission spectroscopy, and indicative high speed imaging, demonstrating the physicochemical processes that lead to supersaturated vapors promoting crystal growth. The product is extensively considered by high resolution transmission electron microscopy, X-ray crystallography, X-ray photoelectron spectroscopy, and particle size distribution measurements. Crystalline spherical nanoparticles with a structure that is stable at room temperature are identified. The importance of the present work consists in the possibility for full scale reliable production of dielectric nanoparticles useful, for instance, in the fabrication of composite materials with superior physical and chemical properties.Tantalum pentoxide ͑Ta 2 O 5 ͒ is a refractory dielectric material extensively used for electronic devices and other applications. Electrolytic capacitors have made use of the chemical and thermal stability of amorphous Ta 2 O 5 having a dielectric constant value between 25 and 27, while ceramics based on crystalline Ta 2 O 5 have exhibited dielectric constant values of up to 280 at room temperature 1 providing obvious merits for construction of miniaturized devices, such as high density dynamic random access memories. 2-4 Additional unique properties of Ta 2 O 5 such as its high refractive index ͑about 2.2͒, very low light absorption coefficient, and wide optical bandgap ͑4.35 eV͒ offer the possibility for further applications such as photonic crystal waveguides or other active optical devices 5 and antireflection coatings on solar cells. 6 Piezoelectric thin films 7 and improved pitting corrosion resistance of metal substrates 8 are two last but not least applications.However, due to their peculiar structural characteristics and size effects, nanomaterials demonstrate some physicochemical properties, which are different from those of the bulk materials and are of great interest both for the theoretical study and for the potential nanodevice applications. 9-11 Thus, doping with the aforementioned important metal oxide on the nanometer scale could tailor the key physical properties of many composite materials. Indeed, Ta 2 O 5 nanoparticles ͑NPs͒ are promising candidates for nonlinear optical materials with good thermal stability, 12 promote photocatalytic reactions under deaerated and aerated conditions, 13 increase the performance of high temperature metal-insulator-silicon carbide gas sensors, 14 provide ceramic/polymer nanocomposites for polymer waveguides, 15 just to name a few applications, and they have generally evoked great interest for the modification of bulk material's characte...

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“…During ZnO depositions in O 2 /Ar working gases, strong emission line from an atomic oxygen (O * ) was detected at 777 nm corresponding to 5p-5s transition, and that from an atomic ion of O + was not detected. Emission line from molecular ion of O þ 2 was detected at 526 nm (first negative system) [17]. The 426 nm emission line was selected for excited Ar corresponding to 5p-4s transition.…”

Section: Plasma Diagnostics During Deposition By Optical Emission Spementioning

confidence: 99%

Oxygen bombardment effects on average crystallite size of sputter-deposited ZnO films

Furuta

Hiramatsu

Matsuda

et al. 2008

Journal of Non-Crystalline Solids

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Optical emission spectra from microwave oxygen plasma produced by surfatron discharge

Cited by 14 publications

References 5 publications

Atom-Scale Reaction Pathways and Free-Energy Landscapes in Oxygen Plasma Etching of Graphene

Atom-Scale Reaction Pathways and Free-Energy Landscapes in Oxygen Plasma Etching of Graphene

Ta[sub 2]O[sub 5] Crystalline Nanoparticle Synthesis by DC Anodic Arc in Water

Oxygen bombardment effects on average crystallite size of sputter-deposited ZnO films

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