1995 International Semiconductor Conference. CAS '95 Proceedings
DOI: 10.1109/smicnd.1995.494893
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Optical, electrical and structural properties of AlN thin films

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Cited by 3 publications
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“…Aluminum molybdenum nitride based coating has been chosen for high temperature solar thermal applications, because both aluminum and molybdenum nitride coating exhibits good optical properties (i.e., low reflectance in the visible region) (Zhu and Tan, 1995). In addition, AlN coating exhibits high decomposition temperature (2490°C), chemical stability (in air up to 700°C), refractive index (1.9-2.1) and good dielectric properties (Morosanu et al, 1995). Further, it is expected that a combination of MoN and AlN will improve the optical properties and thermal stability of AlMoN coatings.…”
Section: Introductionmentioning
confidence: 99%
“…Aluminum molybdenum nitride based coating has been chosen for high temperature solar thermal applications, because both aluminum and molybdenum nitride coating exhibits good optical properties (i.e., low reflectance in the visible region) (Zhu and Tan, 1995). In addition, AlN coating exhibits high decomposition temperature (2490°C), chemical stability (in air up to 700°C), refractive index (1.9-2.1) and good dielectric properties (Morosanu et al, 1995). Further, it is expected that a combination of MoN and AlN will improve the optical properties and thermal stability of AlMoN coatings.…”
Section: Introductionmentioning
confidence: 99%