Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering

Tavşanoğlu, Tolga; Zayim, Esra Ozkan; Ağırseven, Okan; Yıldırım, Sinem; Yücel, Onuralp

doi:10.1016/j.tsf.2019.01.047

Cited by 16 publications

(11 citation statements)

References 44 publications

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“…Пленочные материалы SiC могут быть легко модифицированы для покрытия любой толщины пленки с хорошими микроструктурными, оптическими и электрическими свойствами для различных отражающих или просветляющих и оптоэлектронных процессов (в том числе в отношении структуры и функции осаждения) [3].…”

Section: Introductionunclassified

Nanoscale Films (SiC)1-x(AlN)x Formation Technology

Huseynov¹,

Kardashova²,

Temirov³

et al. 2022

HDSU

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ул. М. Гаджиева, 43аA technology has been developed for producing a high-temperature material (SiC)1x(AlN)x in the form of nanoscale films on a SiC silicon carbide substrate. Studies of the structure and composition of the obtained films have shown that higher-quality monocrystalline films are formed at temperatures close to 1000 K. Optimal technical parameters such as the working gas pressure, the height of the thermalization zone, spray currents, etc., for the formation of single crystals (SiC)1-x(AlN)x are determined on the SiC substrate.

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Section: Introductionunclassified

Nanoscale Films (SiC)1-x(AlN)x Formation Technology

Huseynov¹,

Kardashova²,

Temirov³

et al. 2022

HDSU

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“…Silicon carbide is chemically inert at high temperatures and has good abrasion and radiation resistance. Silicon carbide's superior physical and chemical properties make it ideal for a wide range of applications, including optoelectronics, high-temperature, high-power, and high-frequency electronic devices, X-ray mask materials, solar selective coatings, solar cells, high-temperature gas sensors, phototransistors, blue-light diodes, and wear-and corrosion-resistant applications [22][23][24][25][26][27][28][29]. The properties of SiC films can be easily tailored in the coating composition for any film thicknesses with the optimal microstructural, optical, and electrical properties for different reflective or antireflective optical and optoelectronic applications (in terms of composition and deposition process as well).…”

Section: Introductionmentioning

confidence: 99%

“…The inclusion of dopants enables the regulation of SiC-based thin-film characteristics, particularly the optical bandgap and electrical conductivity, which are appealing for a variety of applications. The literature concerns SiC thin-film growth and customizing characteristics based on application [22,30,31].…”

Section: Introductionmentioning

confidence: 99%

Physical Vapor-Deposited Silver (Ag)-Based Metal-Dielectric Nanocomposites for Thin-Film and Coating Applications

Nur-E-Alam

Basher

Vasiliev³

et al. 2021

Applied Sciences

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Metallic thin-film materials and nanoparticles (mainly silver (Ag)-based) are recently being used in many nano-technological applications, including sensors, reflective heat-mirror coatings, and antibacterial coatings. The physical vapor deposition technique has attracted significant attention for Ag-based nanocomposites with tailoring of the structural and optical properties of metallic thin films, thus allowing for further improvements and application possibilities in various existing fields, namely electronics, catalysis, magnetics, and optics, alongside the environment and health and new emergent fields, particularly thin-film coatings. This study highlights the preparation, characterization, properties, and possible future application directions of several types of silver (Ag)-based nanocomposite thin films prepared by using physical vapor deposition techniques. The high-temperature (above 300 °C) heat-treated composite layer shows significant spectral shifts; however, distinguishingly notable sizes of nanoparticles are not observed, which indicates that this newly developed composite material can be useful for various coating applications.

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“…Silicon carbide is chemically inert at high temperatures and has good abrasion and radiation resistance. Silicon carbide's superior physical and chemical properties make it ideal for a wide range of applications, including optoelectronics, high-temperature, highpower, and high-frequency electronic devices, X-ray mask materials, solar selective coatings, solar cells, high-temperature gas sensors, phototransistors, blue-light diodes, and wear and corrosion-resistant applications [22][23][24][25][26][27][28][29]. The properties of SiC films could be easily tailored in the coating composition for any film thicknesses with the optimal microstructural, optical, and electrical properties for different reflective or antireflective optical and optoelectronic applications (in terms of composition and deposition process as well).…”

Section: Introductionmentioning

confidence: 99%

“…The inclusion of dopants enables for the regulation of SiC-based thin film characteristics, particularly the optical bandgap and electrical conductivity, which are appealing for a variety of applications. Ironic is the literature on SiC thin-film growth and customising characteristics based on applications [22,30,31].…”

Section: Introductionmentioning

confidence: 99%

Physical Vapor Deposited Silver (AG) Based Metal-Dielectric Nanocomposites for Advanced Thin-Film and Coating Applications

Nur-E-Alam¹,

Basher²,

Vasiliev³

et al. 2021

Preprint

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Metallic thin-film materials and nanoparticles (mainly Silver (Ag)-based) are recently being used in many nano-technological applications including sensors, reflective heat-mirror coatings, and antibacterial coatings as well. The physical vapor deposition technique attracts significant attention for Ag-based nanocomposites with tailoring the structural and optical properties of metallic thin films thus allowing further improvements and application possibilities in various existing fields namely electronics, catalysis, magnetics, optics in alongside the environment and health and new emergent fields in, particularly thin-film coatings. This study highlights the preparation, characterization, properties, and possible future application directions of several types of Silver (Ag)-based nanocomposite thin films prepared by using physical vapor deposition techniques.

show abstract

Optical, electrical and microstructural properties of SiC thin films deposited by reactive dc magnetron sputtering

Cited by 16 publications

References 44 publications

Nanoscale Films (SiC)1-x(AlN)x Formation Technology

Nanoscale Films (SiC)1-x(AlN)x Formation Technology

Physical Vapor-Deposited Silver (Ag)-Based Metal-Dielectric Nanocomposites for Thin-Film and Coating Applications

Physical Vapor Deposited Silver (AG) Based Metal-Dielectric Nanocomposites for Advanced Thin-Film and Coating Applications

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