1995
DOI: 10.1016/0079-6816(95)00034-v
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Optical characterisation of semiconductor surfaces and interfaces

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Cited by 166 publications
(51 citation statements)
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“…In contrast, the reflectance of opaque substrates can be measured and, combined with differential methods, can be sensitive to small amounts of silicon. Surface differential reflectance spectroscopy (SDRS), which provides the relative change in reflectance of the sample due to the presence of additional atoms or molecules on the surface, has been shown to be an efficient technique to study adsorption phenomena [18,19], growth of very thin films on such substrates [20][21][22], and also to follow their kinetics [23,24].…”
Section: Introductionmentioning
confidence: 99%
“…In contrast, the reflectance of opaque substrates can be measured and, combined with differential methods, can be sensitive to small amounts of silicon. Surface differential reflectance spectroscopy (SDRS), which provides the relative change in reflectance of the sample due to the presence of additional atoms or molecules on the surface, has been shown to be an efficient technique to study adsorption phenomena [18,19], growth of very thin films on such substrates [20][21][22], and also to follow their kinetics [23,24].…”
Section: Introductionmentioning
confidence: 99%
“…where α is the polarization vector angle of the linearly polarized light with respect to the plane of incidence [15]. The SH response is fitted to Eqs.…”
Section: Theory and Shg Phenomenologymentioning
confidence: 99%
“…Surface and interface sensitive optical techniques offer advantages in this area over conventional surface science techniques. Specifically, all pressure ranges of gas-solid interfaces are accessible, the material damage and contamination associated with charged particle probes is eliminated, and insulating substrates can be studied without the problem of charging effects [15]. For example, it has been shown recently that reflection anisotropy spectroscopy (RAS), a surface sensitive form of polarized reflectance, is a particularly useful in situ probe of Ag NP growth on faceted Al 2 O 3 [7,16], while spectroscopic ellipsometry combined with analytic modelling of the optical response also appears promising [17,18].…”
Section: Introductionmentioning
confidence: 99%
“…(12), we find (13) with (14) with and are given by Eq. (10) , such that the reflection from such a system is given by (15) (16) Here is found iteratively using the following equations,…”
Section: Effective-substrate Approach To Optical Reflection Frommentioning
confidence: 99%
“…Optical reflection techniques such as ellipsometry [1][2][3][4][5][6], surface plasmon polariton wave excitation [7][8][9][10][11], spectral interferometry [12][13][14], reflection anisotropy spectroscopy [15,16] and surface photo-absorption [17], are widely used to monitor processes at surfaces and interfaces of solids. They are desirable for versatility, non-invasiveness, and ease of implementation.…”
Section: Introductionmentioning
confidence: 99%