2003
DOI: 10.1016/s0040-6090(03)00313-4
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Optical and mechanical properties of DLC-Si coatings on polycarbonate

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Cited by 35 publications
(18 citation statements)
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“…H doped DLC films have higher transparency and lower refractive index, that those of pure DLC films [8]. Si-doped DLC films increase the optical gap [9]. N doped DLC films have higher extinction coefficients than those of pure DLC films [10].…”
Section: Introductionmentioning
confidence: 97%
“…H doped DLC films have higher transparency and lower refractive index, that those of pure DLC films [8]. Si-doped DLC films increase the optical gap [9]. N doped DLC films have higher extinction coefficients than those of pure DLC films [10].…”
Section: Introductionmentioning
confidence: 97%
“…Doping DLC with elements, such as Ti, W, Cr, Si and N, has been proposed as an alternative way to reduce the residual stress while maintaining fairly constant hardness values. Furthermore, this solution permits improved adhesion to different substrates and contributes to the inhibition of the graphitization of the films [1][2][3][4][5][6][7][8][9]. Finally, the incorporation of chemical elements in C-based coatings which can lead to carbide formation has been recently used for the deposition of nanocomposite coatings consisting of nanocrystals of the carbide phase immersed in a C-based amorphous matrix [3][4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…Under these conditions, silicon-incorporated hydrogenated amorphous carbon films (DLC-Si) with hardness values around 20 GPa are obtained [7]. Additional details about the deposition and properties of these films can be found elsewhere [6][7][8][9]. Film thickness ranged from 2 to 3 Am in both cases.…”
Section: Methodsmentioning
confidence: 99%
“…Silicon-incorporated diamond-like carbon films (DLC-Si) and amorphous silicon carbide films (a-SiC) also have attracted considerable attention and present a great potential for applications as hard coatings since these films present very high hardness and reduced residual internal stress, high deposition rates and good adhesion to most substrates, including various metal alloys, steels and glasses [2][3][4][5][6][7][8][9]. One of the main advantages of DLC-Si coatings over pure DLC films is the fact that the friction coefficient of the former is independent on ambient humidity [10].…”
Section: Introductionmentioning
confidence: 99%