Optical and Magnetooptical Spectroscopy of the Nanostructural Multilayered Films: Possible Applications

Abstract

Óñïåõè ôèç. ìåò. / Usp. Fiz. Met. 2005, ò. 6, ññ. 135-168 Îòòèñêè äîñòóïíû íåïîñðåäñòâåííî îò èçäàòåëÿ Ôîòîêîïèðîâàíèå ðàçðåøåíî òîëüêî â ñîîòâåòñòâèè ñ ëèöåíçèåé © 2005 ÈÌÔ (Èíñòèòóò ìåòàëëîôèçèêè èì. Ã. Â. Êóðäþìîâà ÍÀÍ Óêðàèíû) Íàïå÷àòàíî â Óêðàèíå.PACS numbers: 78.20.Bh, 78.20.Ls, 79.20 ñòåé ô³çè÷íèõ âëàñòèâîñòåé áàãàòîøàðîâèõ ìåòàëåâèõ ïë³âîê (ÁØÏ) ç òîâùèíàìè ñêëàäàþ÷èõ ¿õ øàð³â ïîðÿäêó îäèíèöü íàíîìåòð³â. Îñíîâíèé ï³äõ³ä äîñë³äaeåííÿ áàçóºòüñÿ íà ïîð³âíÿíí³ åêñïåðèìåíòàëüíî îäåðaeà-íèõ îïòè÷íèõ òà ÌÎ âëàñòèâîñòåé ÁØÏ ç ìîäåëüíèìè, ÿê³ áóëè îäåð-aeàí³ äëÿ ð³çíèõ ìîäåë³â ñòðóêòóðè ÁØÏ. Áóëî ïîêàçàíî, ùî äàíèé ï³ä-õ³ä äîçâîëÿº âèçíà÷èòè ïðèðîäó íåçâè÷àéíèõ ÌÎ âëàñòèâîñòåé, à òàêîae ïðèðîäó ³íòåðôåéñíî¿ îáëàñòè ÁØÏ, ÿê³ ñêëàäàþòüñÿ ç øàð³â áëàãîðîä-íèõ òà 3d-ïåðåõ³äíèõ ìåòàë³â (ÏÌ).  ðîáîò³ òàêîae ïîêàçàíî âèñîêó ÷óò-ëèâ³ñòü ñïåêòðàëüíî¿ åë³ïñîìåò𳿠äëÿ âèâ÷åííÿ òâåðäîò³ëüíèõ ðåàêö³é ó ÁØÏ 3d-ÏÌ/Si, çóìîâëåíèõ éîííèì áîìáàðäóâàííÿì àáî òåðì³÷íèì â³ä-ïàëîì. Îïòè÷í³ âëàñòèâîñò³ ð³çíèõ ñèë³öèä³â 3d-ÏÌ, ÿê³ ñôîðìóâàëèñü ñïîíòàííî àáî çàâäÿêè çîâí³øíüîìó âïëèâó, áóëî âèâ÷åíî åêñïåðèìåí-òàëüíî òà ïîð³âíÿíî ç ðåçóëüòàòàìè òåîðåòè÷íèõ ïåðøîïðèíöèïíèõ ðîç-ðàõóíê³â.The aim of the paper is to show the potential of the spectroscopic ellipsometry and magnetooptical (MO) spectroscopy for probing of the multilayered films (MLF) with sublayer thickness of about a few nanometres.The main approach applied by us is based on the comparison of the experimental optical and MO properties with the simulated ones based on various models of the MLF. Specifically, as shown, such an approach can be useful for studying the nature of unusual MO properties and the interfaces in MLF comprising the noble and 3d-transition metals (3d-TM). The high sensitivity of the applied spectroscopic methods for the monitoring of the solid-state reactions in the 3d-TM/Si MLF induced by ion-beam treatment or by thermal annealing is also demonstrated. The optical properties of various silicides formed spontaneously or induced by various treatments at interfaces are evaluated experimentally and compared with the results of first-principle calculations.