“…Combining of all these properties, CuAlO 2 becomes an important material in the last few years. Several deposition techniques such as pulsed laser deposition [3,4], chemical vapor deposition [13,14], dip-coating [15], spin-on technique [16], ion exchange [17], polymer-assisted deposition [18], sputtering [19][20][21], and electron beam evaporation [22] were employed for the preparation of CuAlO 2 films. Among these techniques, direct current (dc) magnetron sputtering is one of the best technique for the preparation of films on large area substrates with required chemical composition at low substrate temperatures.…”