Effect of substrate temperature on the physical properties of dc magnetron sputtered CuAlO2 films

Effect of substrate temperature on the electrical characteristics of MoSe thin films and back-gated MoSe transistors

“…The reduction of the vacancy defects causes the abatement of the trapping and scattering on the carriers [10], resulting in the increment of the l H of the MoSe x films. However, when the substrate temperature increases to 498 K and 573 K, the apparent tendency of crystallization of the MoSe x films could produce lots of grain boundaries and these boundaries maximize the scattering and trapping of charge carriers [9,23], which causes the sharp reduction of the l H of the MoSe x films. It can be concluded that the amorphous MoSe x films prepared at 298 and 423 K have higher l H than the crystalline MoSe x films.…”

“…So far, researchers have mainly studied the electrical properties of stoichiometric MoSe 2 thin films [5][6][7][8]. However, these films are polycrystalline and the grain boundaries maximize the trap and/ or scattering of the charge carriers, resulting in the reduction the mobility [9]. Thus it is essential to investigate the electrical properties of amorphous films.…”

Microstructural and electrical properties of CuAlO2 ceramic prepared by a novel solvent-free ester elimination process

“…Examples of these are spray method [17], spin coating [18], dip coating [19], PLD [20,22], ebeam [4,21] and sputtering [1e3, 5,6]. PLD, e-beam and sputtering techniques however stand-out.…”

Characteristics of CuCr1−xMgxO2 films prepared by pulsed laser deposition

“…First report about the p-type TCO film of NiO was published in 1993 by Sato et al [4], but the average transmittance of the NiO film in the visible region was about 40%. In 1997, Kawazoe et al [5] reported that the delafossite structure oxide CuAlO 2 film is a p-TCO, which initiated extensive attention to this type of materials [6,7]. Delafossite has two crystalline types 3R and 2H depending on the orientation of each layer in stacking [8].…”