2012
DOI: 10.1149/2.002201ssl
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Optical and Dielectric Characterization of Atomic Layer Deposited Nb2O5 Thin Films

Abstract: DOI to the publisher's website. • The final author version and the galley proof are versions of the publication after peer review. • The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal… Show more

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Cited by 15 publications
(8 citation statements)
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References 15 publications
(17 reference statements)
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“…These values are all above the density of crystalline, monoclinic Nb 2 O 5 (4.60 g/cm 3 ) but closer to the density of orthorhombic Nb 2 O 5 (4.98 g/cm 3 ) but still clearly below the density of NbO 2 (5.90 g/cm 3 ). The observed densities here are also higher than densities between 3.9 and 4.5 g/cm 3 reported for thermal ALD Nb 2 O 5 by Blanquart et al 28 The high density is in line with the stoichiometry derived from the TOF-ERDA composition in Table I: the film is slightly oxygen deficient (Nb 2 O 4.7 ). This may indicate that Nb has partially reduced from +V to +I-V; however, analysis beyond the scope of this study by x-ray photoelectron spectroscopy or x-ray absorption spectroscopy is required to confirm the Nb reduction.…”
Section: B Niobium Oxidesupporting
confidence: 83%
“…These values are all above the density of crystalline, monoclinic Nb 2 O 5 (4.60 g/cm 3 ) but closer to the density of orthorhombic Nb 2 O 5 (4.98 g/cm 3 ) but still clearly below the density of NbO 2 (5.90 g/cm 3 ). The observed densities here are also higher than densities between 3.9 and 4.5 g/cm 3 reported for thermal ALD Nb 2 O 5 by Blanquart et al 28 The high density is in line with the stoichiometry derived from the TOF-ERDA composition in Table I: the film is slightly oxygen deficient (Nb 2 O 4.7 ). This may indicate that Nb has partially reduced from +V to +I-V; however, analysis beyond the scope of this study by x-ray photoelectron spectroscopy or x-ray absorption spectroscopy is required to confirm the Nb reduction.…”
Section: B Niobium Oxidesupporting
confidence: 83%
“…Nb 2 O 5 thin film has also high refraction index (2.2-2.6) and high transparency in UV-vis region. 5 Since Reichman and Bard discovered the electrochromic properties of Nb 2 O 5 , several investigations have been performed to show performance of the electrochemical properties. 6,7 Nb 2 O 5 is a cathodic coloration material and it turns to blue or brown-like color during the coloration process.…”
mentioning
confidence: 99%
“…We note that prepared P3HT/Nb 2 O 5 cells without the TiO 2 film as an electron-accepting layer showed poor device performance because of negligible photocurrent, likely due to the significant increase in series resistance when the TiO 2 layer is replaced by the dielectric Nb 2 O 5 . We therefore argue that only the combination of TiO 2 and Nb 2 O 5 (giving rise to the energy cascade and subsequent reduction in interfacial recombination) leads to an efficiency enhancement (see Supporting Information S3).…”
Section: Resultsmentioning
confidence: 94%