Operation and testing of electrostatic microactuators and micromachined sound detectors for active control of high speed flows

Huang, C. C.; Najafi, K.; Alnajjar, E.; Christophorou, Chris; Naguib, Ahmed; Nagib, Hassan

doi:10.1109/memsys.1998.659733

Cited by 7 publications

(5 citation statements)

References 6 publications

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“…As mentioned before, the sound detectors need to be integrated with microactuators. Figure 4 shows a SEM view of a complete system containing two microactuators and two sound detectors [3]. The actuator details are not provided in this paper.…”

Section: Figurementioning

confidence: 99%

“…To compensate for the lower sensitivity of the piezoresistive readout, an ultra-thin diaphragm and ultra-thin monocrystalline highly boron-doped piezoresistors have been developed using a fabrication technology compatible with that of the microactuators [3]. Figure 1 shows a three-dimensional cut-out in the structure of the sound detector developed here.…”

Section: Introductionmentioning

confidence: 99%

“…Many transduction schemes have been developed over the years to achieve such conversion, including piezoelectric, capacitive, FET and piezoresistive [1]. The current paper describes the development and testing of piezoresistive silicon sound detectors for measurement of the sound field at the lip of a jet during supersonic jet screech [2,3]. Ultimately, an array of these detectors is to be integrated with microactuators to implement a feedback control algorithm aimed at reduction/cancellation of screech noise.…”

Section: Introductionmentioning

confidence: 99%

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A silicon micromachined microphone for fluid mechanics research

Huang

Naguib

Soupos

et al. 2002

J. Micromech. Microeng.

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MEMS piezoresistive sound detectors have been fabricated using the dissolved wafer process for the first time. The sensors utilize stress compensated PECVD ultra-thin silicon-nitride/oxide membrane together with monocrystalline ion-implanted p ++ silicon piezoresistors to achieve high sensitivity. Tests reveal that sensors with a diaphragm size of 710 µm have a static sensitivity of 1.1 µV VPa −1 with 2% non-linearity over an operating pressure range of 10 kPa. This sensitivity is substantially larger than that of commercially available microfabricated sensors. Furthermore, the new sensor's dynamic response is found to be flat (within ±2.5 dB) over a frequency range extending up to 10 kHz. This paper contributes to existing literature in the field by demonstrating a new way of fabricating capable MEMS piezoresistive pressure sensors, hence adding to the overall versatility of the technology and associated range of applications.

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Section: Figurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A silicon micromachined microphone for fluid mechanics research

Huang

Naguib

Soupos

et al. 2002

J. Micromech. Microeng.

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“…(2), (3) As a result, in the last few decades, active flow control using micro actuators has received a lot of attention, and many researchers have successfully demonstrated using micro actuators to manipulate various kinds of flows. For examples, Huang et al (4) developed an electrostatic comb-drive actuator for controlling screech noise of high-speed jets, Grosjean et al (5) microfabricated pneumatic balloon actuators for aerodynamic control of a delta wing, and Liu et al (6) employed micro flap actuators to control flow separation on a small airplane.…”

Section: Introductionmentioning

confidence: 99%

Development of A Compact Synthetic Jet Generator Driven by Electromagnetic Micro Flap Actuator

Pimpin

Bunyajitradulya

2011

JFST

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In this study, a compact synthetic jet generator using electromagnetic micro flap actuator as a driving mechanism is developed and tested. Firstly, the effects of flap's width and length on static and dynamic responses of the driving mechanism are numerically investigated. The results show significant effects of the flap length rather than width. In experiments, the electromagnetic micro flap actuators are fabricated, and the static and dynamic responses for 3 mm wide flaps with 6 and 7 mm long are examined using a high resolution photographing technique and capacitance probe. The significant differences in their static and dynamic responses are observed as expected. After assembling the electromagnetic flap actuator to the synthetic jet generator, its generated jet velocity is examined using CTA anemometer. The maximum jet velocity of 0.6-0.8 m/s at 2 mm downstream from its orifice is obtained at about 600 Hz driving frequency, and no significant effect of driving signal shape, namely sinusoidal and square signals, on the jet velocity is observed. In addition, the jet velocity is comparable to a synthetic jet generator driven by a diaphragm actuator.

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“…In this respect, previous studies have made considerable efforts toward the development of suitable microactuators based on various actuation principles, such as the electrostatic combdrive actuator [5], magnetic flap actuator [6]- [8], piezoelectric Manuscript flap actuator [9], [10], and pneumatic balloon actuator [11]. However, despite such research efforts, previous actuators do not satisfy all the requirements for flow control, i.e., large outof-plane deformation, large actuation force, fast response, low energy consumption, and robustness in a harsh environment.…”

Section: Introductionmentioning

confidence: 99%

Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application

Pimpin

Suzuki

Kasagi

2007

J. Microelectromech. Syst.

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We have established methods for the design and fabrication of a novel MEMS actuator for flow control based on the electrostrictive principle. Patterned metal electrodes were employed in order to obtain large out-of-plane deformation. A series of finite-element method (FEM) analyses of the electrical and strain fields was performed in order to optimize the design parameters. The maximum deformation for 2-mm-diameter actuators reaches 112 µm, which is 5.6% of the actuator diameter and six times larger than that of the plain metal-electrode actuator. The elastic energy density reaches 29% of the stored electrostatic energy. The power consumption at the driving frequency of 100 Hz is estimated to be on the order of 100 µW. The present electrostrictive actuator has a fast response, and its operating frequency is up to several kilohertz. A synthetic jet issuing from a 0.4-mm orifice is successfully developed using the present electrostrictive actuator, and this demonstrates the viability of the present actuator in active flow control.[ 2006-1762]Index Terms-Electrostrictive polymer, finite-element method (FEM) analysis, out-of-plane deformation, patterned metal electrode, synthetic jet.

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Operation and testing of electrostatic microactuators and micromachined sound detectors for active control of high speed flows

Cited by 7 publications

References 6 publications

A silicon micromachined microphone for fluid mechanics research

A silicon micromachined microphone for fluid mechanics research

Development of A Compact Synthetic Jet Generator Driven by Electromagnetic Micro Flap Actuator

Microelectrostrictive Actuator With Large Out-of-Plane Deformation for Flow-Control Application

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