Operating characteristics of the hollow anode glow discharge ion source

Abdelsalam, F. W.; Helal, A.G.; Abdelrahman, M. M.; Soliman, B.A.

doi:10.1016/j.vacuum.2009.09.003

Cited by 3 publications

(5 citation statements)

References 4 publications

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“…1). Beyond this optimal value, plasma instability and mechanical design problems appeared which causes breakdown [4]. Under these conditions, the plasma meniscus should to be concave shape and this result in a focused ion beam (minimum beam diameter).…”

Section: Experimental Investigations and Resultsmentioning

confidence: 99%

“…Also, the optimum length between both the cathode and the anode where found to be at 3mm where a highest possible output ion beam current is 55 μA at PAr + = 2.4x10 -3 Torr, and 0.6 mA discharge current, due to a stable high density plasma at this specific distance (see fig.1). Beyond this optimal value, plasma instability and mechanical design problems appeared which causes breakdown[4]. Under these conditions, the plasma meniscus should to be concave shape and this result in a focused ion beam (minimum beam diameter).…”

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confidence: 99%

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Study the Optimal Operative Conditions of New Glow Discharge Ion Source for Polymeric Treatment

Hassan

Soliman

El-Saftawy

et al. 2022

J. Phys.: Conf. Ser.

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The design, manufacturing, and systematic parametric evaluation of a modified glow discharge ion source (with a pear-shaped anode and a plane cathode) are detailed to extract low-power, high plasma density, and high-intensity ion beam current for material processing. The study includes determining the optimal operative conditions for ion source performance and optimizing its properties. The ion beam current was measured at various argon gas pressures and anode-cathode distances as well as its measurements at various ion source - collector plate distances. At the optimum settings, the influence of discharge pressure on the output current was evaluated using various gases (argon, oxygen, nitrogen and hydrogen). In addition, the influence of applied negative voltages on the extractor electrode (different hole diameters) on the generated ion beam current is being explored. Finally, SIMION computer program evaluated and studied ion beam optics. The simulation and experimental results for a highly efficient ion beam derived from the planned ion source agreed well.

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Section: Experimental Investigations and Resultsmentioning

confidence: 99%

mentioning

confidence: 99%

Study the Optimal Operative Conditions of New Glow Discharge Ion Source for Polymeric Treatment

Hassan

Soliman

El-Saftawy

et al. 2022

J. Phys.: Conf. Ser.

Self Cite

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“…1. The optimum distance between the anode and the cathode has been obtained before [3] and is equal to 3.5 mm. A Faraday cup is placed at a distance 3 cm from the cathode.…”

Section: Resultsmentioning

confidence: 99%

“…It is therefore of interest to examine this process in order to delineate its features and to show some of the possible directions of future use of this technology and to help define the characteristics of the system required to carry out this process. The properties of hollow anode glow discharge ion source have been described before [3]. Recent developments for this type of ion source have been carried out [4] in order to optimize its parameters and to improve its performance.…”

Section: Introductionmentioning

confidence: 99%

Investigation and application of hollow anode glow discharge ion source

Abdelsalam

Helal

Saddeek

et al. 2010

Nuclear Instruments and Methods in Physics Research Section B:

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“…where T e for calculation of u B is used from Equation ( 4), where k is applied to check its effects for the compensation of A e f f for plasma particle losses. To simulate plasma parameters, the discharge current between electrodes was assumed to be given by the Child-Langmiur space-charge limited equation [10,15,16], along with the following conditions: radius of cylindrical source (R) = 10 mm, axial length (L) = 10 mm and argon gas as working gas.…”

Section: Modelmentioning

confidence: 99%

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

et al. 2021

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A compact hollow-anode discharge (HAD) source with a size of 60 mm in radius and 70 mm in length has been developed to stably generate plasma jets for various sputtering processes in semiconductor and display fabrications. A developed HAD plasma source has been investigated by cylindrical electric probes, and the experimental results were compared to the values of numerical calculations. A uniform density discharge model with a geometry factor was proposed to estimate the profiles of plasma parameters. Owing to the difference of absolute magnitude, even with the similar trend of spatial variation, plasma parameters such as electron temperature (Te) and plasma density (ne) measured at z = 3 cm have been calibrated by the values of numerical calculations at the nozzle entrance (z = 0 cm, at the throat of the jet), and the calibration factors for Te and n0 have been deduced by comparing the experimental values to numerical calculations. These are to be explained by the decay mechanism along the axis of the jet with elastic collisions in terms of the mean free path. The developed HAD plasma source was tested for the deposition of Cu thin films with an optimized condition as a plausible application to sputtering processes.

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Operating characteristics of the hollow anode glow discharge ion source

Cited by 3 publications

References 4 publications

Study the Optimal Operative Conditions of New Glow Discharge Ion Source for Polymeric Treatment

Study the Optimal Operative Conditions of New Glow Discharge Ion Source for Polymeric Treatment

Investigation and application of hollow anode glow discharge ion source

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

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