Investigation and application of hollow anode glow discharge ion source

Abdelsalam, F. W.; Helal, A.G.; Saddeek, Yasser B.; Abdelrahman, M. M.; Soliman, B.A.

doi:10.1016/j.nimb.2010.08.011

Cited by 2 publications

(3 citation statements)

References 7 publications

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“…As a DC plasma source, it has the advantage of easy operation, low cost and high homogeneity [7]. However, analysis of plasma jets from the hollow-anode plasma is insufficient for material applications, and more practical data are needed in addition to previous research, due to the lack of measurements of plasma parameters and comparison with theory [5,6,8,9].…”

Section: Introductionmentioning

confidence: 99%

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

et al. 2021

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A compact hollow-anode discharge (HAD) source with a size of 60 mm in radius and 70 mm in length has been developed to stably generate plasma jets for various sputtering processes in semiconductor and display fabrications. A developed HAD plasma source has been investigated by cylindrical electric probes, and the experimental results were compared to the values of numerical calculations. A uniform density discharge model with a geometry factor was proposed to estimate the profiles of plasma parameters. Owing to the difference of absolute magnitude, even with the similar trend of spatial variation, plasma parameters such as electron temperature (Te) and plasma density (ne) measured at z = 3 cm have been calibrated by the values of numerical calculations at the nozzle entrance (z = 0 cm, at the throat of the jet), and the calibration factors for Te and n0 have been deduced by comparing the experimental values to numerical calculations. These are to be explained by the decay mechanism along the axis of the jet with elastic collisions in terms of the mean free path. The developed HAD plasma source was tested for the deposition of Cu thin films with an optimized condition as a plausible application to sputtering processes.

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Section: Introductionmentioning

confidence: 99%

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

et al. 2021

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“…Glow discharges with a hollow cathode and/or anode are widely applied in gas-discharge lamps, spectral sources in atomic absorption spectroscopy, for pumping gas-discharge lasers, for welding materials with an electron gun, for modifying surfaces of solid bodies (etching, depositing thin films), in analytical and plasma chemistry, in thrusters (ion plasma engines) of Hall type, etc [1][2][3][4][5][6][7][8][9]. Therefore the hollow cathode effect is of large interest for students specializing in plasma physics and plasma technologies.…”

Section: Introductionmentioning

confidence: 99%

“…Conventionally, the researchers have investigated the glow discharge with a cylindrical hollow cathode or a segmented one [17]. The glow discharge with a hollow anode was less studied (see [3,4,18] and the references therein). However, as far as we know, there are no papers comparing the modes of burning and the properties of the glow discharge with 'hollow cathode and flat anode' and 'hollow anode and flat cathode' designs.…”

Section: Introductionmentioning

confidence: 99%

Comparing properties of dc discharges in tubes possessing a hollow cathode or anode in an undergraduate laboratory

et al. 2019

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In this paper, we suggest a simple experiment to study the properties of a dc glow discharge in tubes with a ‘hollow cathode and flat anode’ and a ‘hollow anode and flat cathode’ design in the course of undergraduate laboratory work devoted to the research into the characteristics of gas discharges. The work is aimed at observing a phenomenon where employing the tube with a hollow cathode furnishes a much larger discharge current than one can get with a hollow anode design or that with both flat electrodes. Within the certain pressure range (27–40 Pa under our conditions) two negative glows overlap at the center of the cavity resulting in a considerable (several times) increase in the discharge current. The anode shape does not practically affect the discharge current value that is manifested by the fact that current–voltage characteristics for both flat electrodes and the hollow anode design almost coincide.

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Investigation and application of hollow anode glow discharge ion source

Cited by 2 publications

References 7 publications

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes

Comparing properties of dc discharges in tubes possessing a hollow cathode or anode in an undergraduate laboratory

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