On wafer TiO2 nanotube-layer formation by anodization of Ti-films on Si

Self‐organized TiO2 nanotubes: Factors affecting their morphology and properties

“…In such cases careful anodization of the total metal layer is needed, in particular a stop of the anodization process at the correct moment [109]. Additionally, also some nanotube layer liftoff and transfer approaches have been reported [110].…”

Optoelectronic Properties of ZnSe, ITO, TiO2 and ZnO Thin Films

“…(Wang & Lin, 2009) reported that the formation of titanium dioxide nanotube arrays were not only affected by electrolytes and applied potential, but also affected by electrolyte temperature. Recently, titanium dioxide nanotube array films were successfully prepared by anodization of as-prepared ion-beam sputtered titanium thin films at low electrolyte temperature (5°C) and the key parameter to achieve the titanium dioxide nanotube arrays is the electrolyte temperature (Macak et al, 2006). In the present work, the titanium dioxide nanotube arrays are successfully prepared by anodization of as-prepared ion-beam sputtered titanium films at room temperature.…”

Optical and Structural Characterization of TiO2 Nanoparticles

“…Recently, some groups have successfully developed the technology to grow nanoparticles from titanium rod using anodization. Although the electrochemical surface process is the same as for bulk titanium foils, titanium rod may be rapidly etched away in acidic HF or neutral fluoride-containing solutions (forming soluble [TiF 6 ] 2− complexes) because the chemical dissolution rate is considerably high [20] and the quality (density, uniformity) of the titanium rod and the anodization parameters are critical to the formation process of titanium nanoparticles [21], [22]. Moreover, the electrolyte was kept at low temperatures in order to decrease the chemical dissolution rate of the oxide layer formed in acidic solution.…”