On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems

Hou, Ning; Zhang, Liangchi; Zhang, Yong; Zhang, Feihu

doi:10.1080/10408436.2018.1490247

Cited by 18 publications

(9 citation statements)

References 83 publications

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“…It is vital to achieve a globally planarizing surface of key materials and components with high quality and efficiency, which has a significant impact on the performances of devices in the major fields of aeronautics and astronautics, new energy devices, and so on [1][2][3][4][5]. Up to now, chemical mechanical polishing (CMP) technology is one of the most efficient approaches to obtain ultrasmooth and damage-free surfaces globally or locally by synergistically coupling the dual effects of mechanical grinding and chemical etching [6][7][8][9].…”

Section: Introductionmentioning

confidence: 99%

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

et al. 2021

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The chemical mechanical polishing (CMP) technology has been widely used for surface modification of critical materials and components with high quality and efficiency. In a typical CMP process, the mechanical properties of abrasives play a vital role in obtaining the ultra-precision and damage-free surface of wafers for improvement of their performances. In this work, a series of fine structured rod-shaped silica (RmSiO 2 )-based abrasives with controllable sizes and diverse ordered mesoporous structures were synthesized via a soft template approach, and successfully applied in the sustainable polishing slurry for improving the surface quality of cadmium zinc telluride (CZT) wafers. Compared with commercial silica gel, solid and mesoporous silica spheres, the RmSiO 2 abrasives present superior elastic deformation capacity and surface precision machinability on account of their mesoporous structures and rod shapes. Especially, ultra-precision surface roughness and relatively effective material removal speed were achieved by the CMP process using the RmSiO 2 abrasives with a length/diameter (L/d) ratio of 1. In addition, a potential CMP mechanism of the developed polishing slurry to CZT wafer was elucidated by analyzing X-ray photoelectron spectra and other characterizations. The proposed interfacial chemical and mechanical effects will provide a new strategy for improving abrasives' machinability and precision manufacture of hard-to-machine materials.

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Section: Introductionmentioning

confidence: 99%

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

et al. 2021

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“…Lawrence Livermore National Laboratory (LLNL) built the largest large-scale laser fusion device: National Ignition Facility (NIF) [3,4]. The Limeil Laboratory of France and the China Academy of Engineering Physics (CAEP) [5] also built laser fusion ignition devices successively. Nature published two consecutive articles in 2014 [6] and 2019 [7] to report new advances in inertial confined fusion.…”

Section: Introductionmentioning

confidence: 99%

Recent Advances in Laser-Induced Surface Damage of KH2PO4 Crystal

et al. 2020

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As a hard and brittle material, KDP crystal is easily damaged by the irradiation of laser in a laser-driven inertial confinement fusion device due to various factors, which will also affect the quality of subsequent incident laser. Thus, the mechanism of laser-induced damage is essentially helpful for increasing the laser-induced damage threshold and the value of optical crystal elements. The intrinsic damage mechanism of crystal materials under laser irradiation of different pulse duration is reviewed in detail. The process from the initiation to finalization of laser-induced damage has been divided into three stages (i.e., energy deposition, damage initiation, and damage forming) to ensure the understanding of laser-induced damage mechanism. It is clear that defects have a great impact on damage under short-pulse laser irradiation. The burst damage accounts for the majority of whole damage morphology, while the melting pit are more likely to appear under high-fluence laser. The three stages of damage are complementary and the multi-physics coupling technology needs to be fully applied to ensure the intuitive prediction of damage thresholds for various initial forms of KDP crystals. The improved laser-induced damage threshold prediction can provide support for improving the resistance of materials to various types of laser-induced damage.

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“…16,17 A low-quality surface or subsurface can easily reduce the laser-damage threshold (LDT) and the service life of a KDP component. 18,19 How to overcome the difficulties and improve the machinability of KDP has been challenging.There are many issues in relation to the damage-free manufacture of a KDP component, among which the most critical is its complicated deformation mechanisms under external loading. At stressing, a KDP crystal can undergo…”

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Characterization and criteria of phase transformations and lattice slipping in potassium dihydrogen phosphate crystals

Yang

Zhang

2021

J. Am. Ceram. Soc.

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Potassium dihydrogen phosphate (KDP) is an important nonlinear optical material. Since the 1930s, this material has attracted significant attention because of its excellent physical and optical properties. [1][2][3][4] KDP has been widely used in many technological fields, such as laser frequency conversion, high-speed Q-switching, optical communication, and optical signal processing. [5][6][7][8][9] At the present, one can easily obtain a large aperture KDP with the rapid growth technology. 10,11 To use a KDP component in high-energy laser systems [12][13][14][15] ; however, it is required to minimize the surface and subsurface damages which are mostly introduced in a mechanical surface finishing process. An ideal outcome is that the manufactured KDP component is totally damage free. However, KDP is one of the most difficult-to-handle materials due to its fragility, unstable microstructure, and complicated mechanical behavior. 16,17 A low-quality surface or subsurface can easily reduce the laser-damage threshold (LDT) and the service life of a KDP component. 18,19 How to overcome the difficulties and improve the machinability of KDP has been challenging.There are many issues in relation to the damage-free manufacture of a KDP component, among which the most critical is its complicated deformation mechanisms under external loading. At stressing, a KDP crystal can undergo

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On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems

Cited by 18 publications

References 83 publications

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

Recent Advances in Laser-Induced Surface Damage of KH2PO4 Crystal

Characterization and criteria of phase transformations and lattice slipping in potassium dihydrogen phosphate crystals

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