The formation of helium, carbon, and nitrogen ion charge equilibrium upon their penetration through thin carbon films is examined. The ions under consideration have different initial charges and ener gies ranging from 0.3 to 3 MeV/nucleon. A semiempirical formula based on measured data is proposed for calculating the dependence of the mean nonequilibrium ion charge on the target thickness and estimating the carbon target thickness corresponding to the achievement of an equilibrium charge state.