On the optimization of the laser ablation process for the deposition of YBa2Cu3O7− thin films

Norton, M. Grant; Carter, C.B.

doi:10.1016/0921-4534(90)90641-q

Cited by 40 publications

(9 citation statements)

References 15 publications

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“…The rate of deposition, as well as the temperature, has a strong influence on the film microstructure [74] because it determines the rate of nucleation. For a given substrate temperature, a lower deposition rate will result in a lower rate of nucleation and a longer mean free diffusion time of mobile atoms on the surface.…”

Section: Thin-film Deposition Methodsmentioning

confidence: 99%

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Rickerby

Serventi

2010

Environanotechnology

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Section: Thin-film Deposition Methodsmentioning

confidence: 99%

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Rickerby

Serventi

2010

Environanotechnology

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“…In the years that followed, a lot of attention was paid to the nature of the laser-target interaction and the influence of the laser parameters on the quality of the thin films. For example, in the table taken from Norton et al [4], it can be seen how the different parameter settings were prioritised in terms of their role in the formation of an epitaxial, crystalline film (Table 1).…”

Section: Introductionmentioning

confidence: 99%

Oxygen in Complex Oxide Thin Films Grown by Pulsed Laser Deposition: a Perspective

Koster

Blank

Rijnders

2019

J Supercond Nov Magn

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For thin film synthesis of complex oxides, one of the most important issues has always been how to oxidise the material. For a technique like pulsed laser deposition, a key benefit is the relatively high oxygen background pressure one can operate at, and therefor oxidation should be relatively straightforward. However, understanding the microscopic oxidation mechanisms turns out to be rather difficult. In this perspective, we give a brief overview of the sources of oxidation for complex oxide thin films grown by pulsed laser deposition. While it is clear what these sources are, their role in the kinetics of the formation of the crystal structure and oxygen stoichiometry is not fully understood.

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“…While the substrate temperature mainly affects the amorphous or crystalline character and the grain size of the deposited film, 2,3 the laser energy density together with the gas pressure determines the microstructure, composition, and lateral distribution of the deposited film. [2][3][4] Both the nature of the laser-generated plasma and the deposition atmosphere significantly influence the film characteristics. 5,6 A further understanding of the plasma processes, in addition to its intrinsic interest, opens the way to reliable control of the film deposition process.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive study of the film surface temperature and plasma thermokinetics during La1.85Sr0.15CuO4 deposition by laser ablation

Buzea

Wang

Nakajima

et al. 1999

Journal of Applied Physics

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Articles you may be interested inTime relaxation of flux rotation and dimensional crossover in La 1.85 Sr 0.15 Cu O 4We report a comprehensive study of the film surface temperature (T S ) variation during La 1.85 Sr 0.15 CuO 4 deposition by laser ablation as a function of the process parameters ͑oxygen pressure and target-substrate distance͒. For high O 2 pressures, T S ͑measured with an infrared pyrometer͒ follows a decreasing exponential law, while for lower oxygen pressures the experimental data suffer a departure from the theoretical curve. The observed deviation suggests the existence of nonsteady thermal processes in the plume during deposition. The modifications of plume kinetics along with the characterization of deposited films provide important information and a better understanding of the pulsed-laser deposition process.

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On the optimization of the laser ablation process for the deposition of YBa2Cu3O7− thin films

Cited by 40 publications

References 15 publications

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Nanostructured Metal Oxide Gas Sensors for Air-Quality Monitoring

Oxygen in Complex Oxide Thin Films Grown by Pulsed Laser Deposition: a Perspective

Comprehensive study of the film surface temperature and plasma thermokinetics during La1.85Sr0.15CuO4 deposition by laser ablation

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