On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

Ghasemi, Salar; Afrang, Saeid; Rezazadeh, Ghader; Darbasi, Sima; Sotoudeh, Behzad

doi:10.1007/s00542-020-04779-9

Cited by 19 publications

(12 citation statements)

References 31 publications

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“…Due to its advantages of suppressing nonlinearities and increasing actuation force, comb drive MEMS resonator found many applications, such as micromirrors [1], gyroscopes [2], accelerometers [3], energy harvesters [4], etc. However, the nonlinearity caused by elastic deformation and electrostatic force of the resonator may result in particular response characteristics such as hardening/ softening behaviors [5], pull-in [6], chaos [7], etc., and consequently affect the performance of the resonator.…”

Section: Introductionmentioning

confidence: 99%

“…Zhang et al [16] investigated the nonlinear dynamics of a resonator with time-delayed control, and pointed out that the positive gain makes the system unstable and the negative gain leads to the disappearance of jumping phenomena. Ghasemi et al [4] used a combination of mechanically softening and hardening springs to achieve a high tuning range of resonant frequency for energy harvesting applications. Nashat et al [17] demonstrated that a large displacement can be obtained by reducing the pull-in voltage and increasing the overlaps.…”

Section: Introductionmentioning

confidence: 99%

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Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator

Zhang

et al. 2022

Micromachines

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In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response. Then, the singularity theory is employed to give the transition sets on the DC-AC voltage plane and the lateral separation-quality factor plane, which divide the planes into 9 persist regions. The corresponding bifurcation diagrams are present to discuss the jump phenomena of the periodic response, and the influences of the parameters on the amplitude-frequency response are studied. We also attempt to analyze the feasibility for the resonators working in the nonlinear regions and give the available frequency range and the available maximum amplitude of the nonlinear response. With the increase of the DC voltage, the amplitude-frequency curves change from hardening to softening, and the lateral separation has the opposite effect. The amplitude-frequency curves increase along the backbone curves with the AC voltage and quality factor. The response curves of softening or hardening characteristics have enough available frequency range and large available amplitudes, which may be more appropriate for the operation of the resonator than those of the mixture characteristics.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator

Zhang

et al. 2022

Micromachines

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“…In recent decades, advances in micro electro-mechanical systems (MEMS) including performance enhancement, low power consumption and low fabrication cost have attracted remarkable attention to the use of microdevices in various applications such as micromirrors [1], micro-switches [2], microresonators [3,4], pressure sensors [5], energy harvesters [6,7], gas sensors [8] and capacitive structures [9]. Nevertheless, among various microdevices, capacitive micromachined ultrasonic transducers due to their various benefits including reliable fabrication processes with ease and lower cost, integration with signal processing electronics, efficient performance, low impedance, higher resolution and high transduction coefficient became as an effective technology to overcome many constraints associated with traditional transducers and it can be considered as a primary candidate for next generation of transmitting and receiving ultrasound waves [10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Adaptive under-actuated control for capacitive micro-machined ultrasonic transducer based on an accurate nonlinear modeling

et al. 2022

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A capacitive micromachined ultrasonic transducer (CMUT) due to many benefits is being considered as an imaging and therapeutic technology recently. The critical challenge here is to stabilize the system beyond the pull-in voltage considering imposed perturbations. The CMUT system, on the other hand, has a low range of travel and it is intrinsically unstable, which can result in a pull-in phenomenon. Consequently, in order to use the CMUT systems in a variety of medical applications that require high tuning ratio, a closedloop control technique has been designed for these systems aims at increasing the maximum capacitance and enhancing tunability as well. In this study, using the closed-loop control, the resistance of micro plate against the pull-in phenomenon has been examined. Also, in the description of the system a more accurate nonlinear modeling has been considered in the presence of an under-actuated sliding model control strategy with finite convergence time. Beside, adaptive protocols with unknown upper bounds have been designed to compensate the effects of uncertainty, unmodeled dynamics and external disturbances. The performance of controller in terms of improving output pressure, stabilizing the CMUT and its robustness to imposed perturbations have been investigated. Finally, numerical simulations

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“…The unique softening and hardening of nonlinear dynamic systems could be expected to overcome the disadvantages of linear systems. Ghasemi et al [ 9 ] used the L-shaped beam with nonlinear softening stiffness to increase the bandwidth and gain of the energy harvester. The acquisition effect of the energy harvester by considering both the electrostatic force nonlinearity and the stiffness softening nonlinearity has also been discussed.…”

Section: Introductionmentioning

confidence: 99%

Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force

Wang¹,

Lu²,

Zhang³

et al. 2022

Micromachines

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In this paper, we use the nonlinear hardening stiffness of drive mode deal with the contradiction between gain and bandwidth of the linear micro-gyroscope, to improve the bandwidth and gain in sense direction. Firstly, in order to adjust the distance between two resonant peaks, we changed an incomplete two-degree-of-freedom(2-DoF) sense mode system of the micro-gyroscope into a complete 2-DoF system. Afterward, according to the given nonlinear coefficient of stiffness of drive mode, the structure size of driving micro-beams was designed to obtain a nonlinear micro-gyroscope with controllable stiffness. Finally, we investigated the effects of peaks spacing, damping, and driving nonlinearity on gain and bandwidth, and the nonlinear micro-gyroscope was optimized by orthogonal experiment method and response surface method. The results reveal that the peaks spacing has a great influence on the gain and bandwidth of both linear and nonlinear micro-gyroscopes. The larger the peaks spacing, the lower the gain, but higher gain can be achieved when the resonant frequency of the drive mode is close to the lower-order resonant frequency of the sense mode. Driving nonlinearity leads to the response peak of the Coriolis force to have a hardening characteristic, thus forming a wide platform in the sense direction. Hardening of the response peak of the Coriolis force allows the micro-gyroscope to obtain a higher gain while the bandwidth of the sense mode is also greatly improved. In addition, parameter optimization can make the gain and bandwidth of the micro-gyroscope optimal. When the peaks spacing is small and the nonlinear stiffness coefficient is about 1012.2, under the premise that the gain is basically constant, the bandwidth of the sense mode increases about 1.76 times compared with the linear gyroscope. Damping can suppress the influence of nonlinearity in a micro-gyroscope system. Within a certain range, the frequency response of the nonlinear micro-gyroscope tends to be a linear system with the increase in damping, resulting in narrower bandwidth and lower gain.

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On the mechanical behavior of a wide tunable capacitive MEMS resonator for low frequency energy harvesting applications

Cited by 19 publications

References 31 publications

Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator

Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator

Adaptive under-actuated control for capacitive micro-machined ultrasonic transducer based on an accurate nonlinear modeling

Design, Dynamics, and Optimization of a 3-DoF Nonlinear Micro-Gyroscope by Considering the Influence of the Coriolis Force

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