optical losses. [8][9][10][11][12][13][14] Hence, both the quantum efficiency (QE) and short-circuit current density of the solar cells can potentially be enhanced when properly implemented. Several experimental and simulation approaches have been carried out to derive the optimal textured interfaces. [4,7,9,15] However, realization and modeling of the optimal textured interfaces are complex because several factors have to be considered. [4,7,9,15] In order to realize the solar cells with high energy conversion efficiency, it is necessary to maximize the product of short-circuit current density, open-circuit voltage, and fill factor. Texturing the interfaces affects not only the short-circuit current density. The open-circuit voltage and fill factor are affected too by changing the surface texture of microcrystalline silicon thinfilm solar cells. [2,7,[16][17][18][19][20][21][22][23][24][25][26] Microcrystalline silicon films grown on textured surfaces exhibit a high concentration of microstructure-induced recombination centers, while the silicon films prepared on smooth surfaces do not exhibit such microstructure-induced recombination centers. [16,18,[23][24][25][26] A high concentration of recombination centers is observed in regions with reduced structural order, often called "cracks" or "voids." The concentration of cracks increases with increasing roughness of the substrate. [14,16,18,[23][24][25][26] As a result, the crack formation affects the charge collection efficiency of the solar cells. Furthermore, the open-circuit voltage and fill factor are affected. [7,16,18,[22][23][24][25][26] Hence, these electrical properties of the microcrystalline silicon solar cell have to be considered when optimizing its light-trapping properties.The microcrystalline silicon (µc-Si:H) solar cells fabricated on hexagonal textured substrates exhibit the highest short-circuit current density of up to 32.9 mA cm −2 , and energy conversion efficiency up to 11.8%. [3,6] The highest short-circuit current density of 32.9 mA cm −2 is obtained for a 4 µm thick solar cell on a hexagonal textured substrate with period of 4 µm, while the highest energy conversion efficiency is obtained for a solar cell with a thickness of 1.7 µm on a hexagonal textured substrate with a period of 2.0 µm. [3,6] However, it remains unclear if hexagonal textured substrates represent the best possible substrate. Hence, in this study, the influence of different textured substrates on the QE, short-circuit current density, and formation of cracks is studied.In the following, the µc-Si:H solar cells with different substrate textures are compared in respect of the optical properties Microcrystalline silicon thin-film solar cells prepared on hexagonal tiled surfaces exhibit record short-circuit current densities and energy conversion efficiencies. However, it remains unclear if hexagonal textured substrates represent the best possible substrate tiling. In this study, hexagonal tiled substrates are compared with square and triangular tiled substrates in terms of...