On the impact of mechanical stress on gate oxide trapping

Kruv, Anastasiia; Kaczer, B.; Grill, Alexander; González, Mario; Franco, J.; Linten, Dimitri; Goes, Wolfgang; Wolf, Ingrid De

doi:10.1109/irps45951.2020.9129541

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On the impact of mechanical stress on gate oxide trapping

Cited by 5 publications

References 14 publications

Significant Enhancement of HCD and TDDB in CMOS FETs by Mechanical Stress

Significant Enhancement of HCD and TDDB in CMOS FETs by Mechanical Stress

Hot-Electron-Induced Punch-Through (HEIP) Effect in p-MOSFET Enhanced by Mechanical Stress

Cylindrical Indentation to Selectively Stress Nanoscale CMOS Transistors

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