2015
DOI: 10.1063/1.4906123
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On the effective mobility extraction by point-contact techniques on silicon-on-insulator substrates

Abstract: In this work, we introduce the mobility vs. effective electric field representation for bare siliconon-insulator substrates. The key factors determining the effective field in the silicon film are identified and modeled. This representation sheds light on the origins of the carrier mobility differences observed in passivated and non-passivated wafers. At low effective electric field, the roles of the Coulomb scattering, determined by the top-interface, and the impact of the silicon film thickness are clearly d… Show more

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Cited by 8 publications
(2 citation statements)
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“…This type of measurement is easier to be carried out, since there is no need to take precautions regarding probe alignment, but it is affected by the impact of the contact resistance which can eventually mask the intrinsic conductivity of the sample under study. 21 Note also that even in the case that the contact resistance could be neglected, the resistance measured by the rst method may not correspond to the value given by V 2-3 /I 2-3 due to the current spreading. Nevertheless, the two point-contact method represents a good procedure to determine the contact resistance (distance-dependent two-point probe method).…”
Section: Sample Preparation and Experimental Setupmentioning
confidence: 99%
“…This type of measurement is easier to be carried out, since there is no need to take precautions regarding probe alignment, but it is affected by the impact of the contact resistance which can eventually mask the intrinsic conductivity of the sample under study. 21 Note also that even in the case that the contact resistance could be neglected, the resistance measured by the rst method may not correspond to the value given by V 2-3 /I 2-3 due to the current spreading. Nevertheless, the two point-contact method represents a good procedure to determine the contact resistance (distance-dependent two-point probe method).…”
Section: Sample Preparation and Experimental Setupmentioning
confidence: 99%
“…Mobility is a key quantity in electronic transport that provides an understanding of the physical processes affecting the motion of free carriers [1][2][3][4]. Comparative analysis of mobility as a key figure of merit of heterosystems is of great importance in synthesizing novel materials, developing novel thin-film technologies, interface modification, controlling fabrication of films and devices on their base [5][6][7][8][9][10].…”
Section: Introductionmentioning
confidence: 99%