2009
DOI: 10.1007/s00542-009-0822-5
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On the determination of Poisson’s ratio of stressed monolayer and bilayer submicron thick films

Abstract: In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual stress (r 0 ) and biaxial Young's modulus (E/(1 -t)). Associating square and rectangular membranes with different length to width ratios, the Poisson's ratio (t) can also be determined. LPCVD Si 3 N 4 monolayer and Si 3 N 4 /SiO 2 bilayer membranes, with thicknesses down to 100 nm, have been characterized giving results in agreement… Show more

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Cited by 7 publications
(4 citation statements)
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References 17 publications
(32 reference statements)
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“…The Poisson’s ratio of a multilayer film of randomly oriented NFC with PEI thus falls in the range of 0.30 to 0.37, which does not change the calculate E f value outside of the ±0.2 GPa error interval reported. Poisson’s ratios for submicrometer thick films can sometimes be determined using bulge tests or digital speckle photography, and the need to determine the exact Poisson’s ratio for NFC, PEI, and the multilayer film is apparent, however, it was beyond the scope of the present work.…”
Section: Resultsmentioning
confidence: 99%
“…The Poisson’s ratio of a multilayer film of randomly oriented NFC with PEI thus falls in the range of 0.30 to 0.37, which does not change the calculate E f value outside of the ±0.2 GPa error interval reported. Poisson’s ratios for submicrometer thick films can sometimes be determined using bulge tests or digital speckle photography, and the need to determine the exact Poisson’s ratio for NFC, PEI, and the multilayer film is apparent, however, it was beyond the scope of the present work.…”
Section: Resultsmentioning
confidence: 99%
“…Estimates for the Young’s modulus of membranes have been provided by experiments (Tierney et al, 2005 ; Popescu et al, 2006 ). However, the measuring of the Poisson’s ratio is not straightforward, due to the small thickness of membranes in the nanometer range (Mitchell et al, 2003 ; Martins et al, 2009 ). From the theoretical aspect, mechanical properties of lipid membranes are commonly investigated based on the Helfrich Hamiltonian.…”
Section: Introductionmentioning
confidence: 99%
“…The applied pressure ranges from 0 to 500 mbar in order to remain in the elastic domain, and the resulting membrane deflection is measured by using a WYCO NT1100 white-light interferometer microscope [6].…”
Section: Nanoindentation Bulge-test and Microtensile Test : Experimementioning
confidence: 99%