On the determination of particle concentrations in multitemperature plasmas

Richley, E. A.; Tuma, D. T.

doi:10.1063/1.330490

Cited by 64 publications

(37 citation statements)

References 10 publications

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“…We have made the calculations for three ratios f3 = Ttre-/Ttrh equal to 1, 1.5, 2 with the same temperature hypothesis: T,,, = T t r h ; On these figures, we see that the concentrations obtained by using eq. (18) and with those obtained by the Gibbs free energy minimisation method [4] are in good agreement. Fig.…”

Section: E T E R M I N a T I O N Of T H E C O M P O S I T I O N A Tsupporting

confidence: 82%

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Numerical Method and Composition at and out of Chemical Equilibrium in a Multitemperature Plasma. Application to a Pure Nitrogen Plasma

André

1997

Contrib. Plasma Phys.

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The disequilibrium between the temperatures (excitation, rotation, vibration, translation) in plasmas lead us to specific chemical potentials. Then, they are used to develop a mass action law in a multitemperature plasma. This mass action law enables us to determine the composition of a pure nitrogen mixture out of thermal equilibrium.The composition evolution versus time is determined from a kinetic method modified to take into account different temperature hypotheses.The composition and different thermodynamic properties of a pure nitrogen mixture are given at the chemical equilibrium, then versus time for various temperature hypotheses and thermal disequilibriums.

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Section: E T E R M I N a T I O N Of T H E C O M P O S I T I O N A Tsupporting

confidence: 82%

“…These coefficients depend on their reaction temperatures (Ttre-or zrh) [18]. We must note that the rate coefficients Pf and P", are badly determined [6, 71.…”

Section: Kinetics Of Chemicai Reactionsmentioning

confidence: 99%

Numerical Method and Composition at and out of Chemical Equilibrium in a Multitemperature Plasma. Application to a Pure Nitrogen Plasma

André

1997

Contrib. Plasma Phys.

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“…8 are equal to zero [19]. Figure 2 depicts the species number densities of an atmospheric-pressure plasma in the Ar-H 2 mixture for h = 1 and 3 ðh ¼ T e =T h Þ.…”

Section: Composition Of a Spatially Homogeneous Ar-h 2 Plasmamentioning

confidence: 98%

Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Murphy

Ishigaki

2007

Plasma Chem Plasma Process

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The species densities and the thermal and chemical nonequilibrium phenomena in an Ar-H 2 radio frequency inductively coupled plasma reactor used for hydrogenation of materials have been investigated through numerical simulation. The mathematical model consists of a two-temperature fluid dynamics model and a chemical kinetics model that takes into account the effect of local chemical nonequilibrium. Computations are carried out for the rf plasma running at 11.7 kW and 27 kPa for different Ar-H 2 mixtures and for pure argon. Predicted results for the electron and heavy-species temperatures, the species densities, as well as the degree of thermal and chemical nonequilibrium, are presented in detail. It is found that the electron and hydrogen atom densities in the reactor and in the near-wall region of the torch are strongly altered by nonequilibrium effects. The hydrogen atom density remains high in the reactor zone, and peaks in a region that has been found to be attractive for material processing. Deviations from thermal and chemical equilibrium are greatly reduced by the addition of hydrogen to an argon plasma.

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“…Different relations in the literature were derived to describe the ionization and dissociation reactions and the main models include Potapov's method, 30 method of van de Sanden et al, 31 Gibbs free energy minimization method, 45,46 as well as the kinetic model. 47 For the law of mass action, two main derivations, respectively, by Potapov's method and method of van de Sanden et al are developed in previous literature. Using the argument that in the extreme cases of very high and very low electron number density, the dissociation and ionization laws must not depend on h ¼ T h /T e , the same expressions as those of van de Sanden et al are 26 Gleizes et al, 27 and Andr e et al, 49 respectively, presented their own derivations of the excitation temperature.…”

Section: B Determination Of Plasma Compositionmentioning

confidence: 99%

Thermodynamic and transport properties of two-temperature SF6 plasmas

Wang

Rong

et al. 2012

Physics of Plasmas

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This paper deals with thermodynamic and transport properties of SF 6 plasmas in a two-temperature model for both thermal equilibrium and non-equilibrium conditions. The species composition and thermodynamic properties are numerically determined using the two-temperature Saha equation and Guldberg-Waage equation according to deviation of van de Sanden et al. Transport properties including diffusion coefficient, viscosity, thermal conductivity, and electrical conductivity are calculated with most recent collision interaction potentials by adopting Devoto's electron and heavy particle decoupling approach but expanded to the third-order approximation (second-order for viscosity) in the frame of Chapman-Enskog method. The results are computed for various values of pressures from 0.1 atm to 10 atm and ratios of the electron temperature to the heavy particle temperature from 1 to 20 with electron temperature range from 300 to 40 000 K. In the local thermodynamic equilibrium regime, results are compared with available results of previously published studies. V C 2012 American Institute of Physics. [http://dx.

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On the determination of particle concentrations in multitemperature plasmas

Cited by 64 publications

References 10 publications

Numerical Method and Composition at and out of Chemical Equilibrium in a Multitemperature Plasma. Application to a Pure Nitrogen Plasma

Numerical Method and Composition at and out of Chemical Equilibrium in a Multitemperature Plasma. Application to a Pure Nitrogen Plasma

Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions

Thermodynamic and transport properties of two-temperature SF6 plasmas

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