On the determination of energy fluxes at plasma–surface processes

Temperature of Particulates in Low‐Pressure rf‐Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

“…On the other hand, the potential for obtaining the temperature of surfaces in a plasma gives access to the energetic conditions at the surface, which are determined by a balance of several contributions of energy gain and loss [3,4]. This correlation has first been utilized by Thornton to measure heat fluxes onto dummy surfaces in a magnetron sputtering source by observing its temperature evolution after switching the plasma on and off [5].…”

A Heat Flux Microsensor for Direct Measurements in Plasma Surface Interactions

“…It is interesting to note that the global transferred energy is higher far from the target because the Ar plasma contains the most energy at this location. However, the obtained films exhibit low density, which is usually attributed to a growth process that takes place when low energy is available at the surface [20]. Indeed, our results show that the energetic contribution that drives the film characteristics is the energy deposited by the condensing atoms, which is higher at 3 cm.…”

“…Among them, calorimetric probes, based on an original idea of Thornton [10], were successfully applied to plasma science [15][16][17][18]. Some sophisticated thermal probes have been developed [19][20][21], such as for example the one designed in the IEAP Kiel, which consists of a thermocouple brazed to a metal plate (substrate dummy). This probe has been used by Kersten et al to characterize many kinds of low pressure plasmas used for powder generation, space propulsion, PECVD, etc [17,21].…”

Plasmas meet plasmonics

“…This control over the generation of nanostructure material, transport to and interaction with the surface is enabled by careful modification of the plasma parameters such as power, pressure, gas composition, etc. as well as the external surface bias [128][129][130][131][132].…”