The hot carrier injection (HCI) of tunnel field-effect transistors (TFETs) is analyzed quantitatively under various conditions in terms of HCI-induced gate current (IG), HCI probability (IG/ID), potential energy, and lateral/vertical electric field for the first time. For example, the IG and IG/ID of TFETs are predicted in comparison with those of metal-oxide semiconductor FETs (MOSFETs) with the variation of gate voltage (VG), drain voltage (VD), gate insulator thickness (Tins), and channel length (Lch). According to the simulation results, TFETs show higher HCI probability than MOSFETs under the entire bias conditions because the former features strong peak lateral field at source-channel junction. For example, TFETs show ~1.8×10 2 x higher HCI current and ~5.9×10 6 x higher HCI probability than MOSFETs at VG = 4 V and VD = 3 V. The optimal HCI bias condition of TFETs is also analyzed.INDEX TERMS Tunnel field-effect transistors (TFETs), metal-oxide field-effect transistors (MOSFETs), hot carrier injection.