On Shallow Trench Isolation for Deep Submission CMOS Technologies

Chatterjee, Amitava; Nandakumar, M.; Ashburn, S.; Gupta, Vikas; Kwok, S. P.; Chen, Ih-Chin

doi:10.7567/ssdm.1998.a-8-1

Extended Abstracts of the 1998 International Conference on Solid State Devices and Materials 1998

DOI: 10.7567/ssdm.1998.a-8-1

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On Shallow Trench Isolation for Deep Submission CMOS Technologies

Amitava Chatterjee¹,

M. Nandakumar²,

S. Ashburn³

et al.

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On Shallow Trench Isolation for Deep Submission CMOS Technologies

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