On Explanation of the Double-Valued Paschen-Like Curve for RF Breakdown in Argon

Savić, Marija; Radmilović-Radjenović, M.; Šuvakov, Milovan; Marjanović, S.; Marić, Dragana; Petrović, Zoran Lj.

doi:10.1109/tps.2011.2159244

Cited by 21 publications

(12 citation statements)

References 3 publications

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“…This provides a support to the expansion of the use of the model to RF plasmas [30]. In addition, it would be interesting to expand the measurements to RF breakdown and thus test the existing theories [31]. Finally, one could also pay closer attention to the Townsend regime where absolute calibration may provide data to model heavy particle effects at high E/N [32] or provide data on ionization coefficients [12] and kinetics of nonlocal discharges [33] and runaway electrons [34], even data required to study streamers and ionization fronts [35].…”

Section: Resultsmentioning

confidence: 72%

Breakdown and discharge regimes in standard and micrometer size dc discharges

Škoro¹

2012

J. Phys.: Conf. Ser.

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Breakdown and discharge regimes in standard and micrometer size dc discharges Abstract. In this paper, an overview of our recent experimental studies of the breakdown and operation of non-equilibrium discharges in centimetre and micrometer size geometries is presented. In the centimetre size geometries, we focused on elementary processes and phenomenology in gases used for some of the currently most attractive applications of low temperature plasmas -fluorocarbon gases (CF 4 , CHClF 2 ) and water vapour. Measurements were performed at electrode separation d = 1.1 cm, in a pressure range from 0.1 to 5 Torr. In the case of micro-discharges, the emphasis was on testing the validity of standard scaling laws and proper determination of scaling parameters pd and j/p 2 . This was done at electrode gaps of 200 and 500 μm and pressures of 50 and 20 Torr in argon. The investigation is based on measurements of breakdown potentials (Paschen curves) and Volt-Ampere characteristics, supported by simultaneous ICCD imaging of the discharges. IntroductionOwing to many unique properties, low temperature non-equilibrium discharges have been used in a large number of applications. Fundamental investigations lead to new applications but, recently, in many cases, the needs of applications led to numerous fundamental results. On all accounts, the complexity of these discharges call for full understanding of discharge processes in order to make efficient and reliable devices. Moreover, along with numerous non-equilibrium discharge sources in centimetre size [1,2], many sources with micrometre characteristic dimensions have been introduced recently [3,4]. Hence, an ongoing direction of research about discharges in molecular gases and gas mixtures of interest for applications [5] has been appended with new challenges of discharges taking place between electrodes separated by few tens or hundreds of micrometers -micro-discharges [6]. Additionally, a new type of non-equilibrium discharges taking place in or near liquids has emerged [7], bringing new possibilities for applications together with a whole new set of issues to resolve.Accordingly, results presented in this paper are divided in two sections. The first one deals with measurements conducted with cm-size chamber. Using previously gathered experience on standard size non-equilibrium discharges in rare gases at low pressures [8][9][10][11][12], our research is continued with experimental measurements in gases of interest for applications: fluorocarbons (CF 4 and CHClF 2 ) which are widely used for plasma etching (e.g. [13]) and water vapour that is present as working environment of numerous commercial devices [14]. Measurements in these gases aim to provide reliable and systematic data sets required for plasma models that may be extended to applications involving those gases.

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Section: Resultsmentioning

confidence: 72%

Breakdown and discharge regimes in standard and micrometer size dc discharges

Škoro¹

2012

J. Phys.: Conf. Ser.

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“…Cross‐section sets have been compiled and tested (argon, oxygen – Itikawa; synthetic air – Phelps). In our previous paper, we have examined radio‐frequency breakdown in argon under conditions when ion‐induced secondary emission is negligible (electron‐dominated regime) . In this paper, we move further by including ions and their contribution to secondary electrons emitted from electrodes surfaces.…”

Section: Pre‐breakdown Free Electrons In Ionized Gasesmentioning

confidence: 99%

“…Breakdown points are determined by slowly increasing the voltage to approach the breakdown from below the curve (right hand side and lower branch of the curve) and by increasing pressure to approach higher breakdown voltage branch (left hand side). Breakdown point is established as the one where the number of electrons begins to increase over extended time of many periods (detailed discussion is given in ref …”

Section: Pre‐breakdown Free Electrons In Ionized Gasesmentioning

confidence: 99%

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Using Swarm Models as an Exact Representation of Ionized Gases

Petrović

Marić

Savić

et al. 2016

Plasma Processes & Polymers

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In this review, several examples of ionized gases are presented where swarm models may be employed to provide full description. Those situations include low space charge pre‐breakdown, Townsend region breakdown where space charge effects may be calculated from the swarm model and used as the first order perturbation to describe oscillations and transient signal and afterglows. In addition, implications are considered for microdischarges, discharges in and close to liquids, gas‐filled particle traps, thermalization of particles in living tissue, and many more. In all those situations, swarm models provide full description of the discharge, while for most other collision dominated non‐equilibrium plasmas swarm physics (transport‐related phenomena) provides a part of the foundation of modeling.

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“…When the generation rate of charged species exceeds that of losses, the rapid increase in the number of particles leads to gas breakdown. [3][4][5] Both direct current (DC) and radio frequency (RF) discharges have been reported [6][7][8][9][10][11][12] with DC gas breakdown for relatively large microgaps (>7 lm) well-studied especially at atmospheric pressure. 6,[13][14][15] EII and SEE are the two main mechanisms of breakdown for these gaps and results in the Townsend avalanche breakdown leading to the Paschen curve.…”

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confidence: 99%

Pre-breakdown evaluation of gas discharge mechanisms in microgaps

Semnani

Venkattraman

Alexeenko

et al. 2013

Applied Physics Letters

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The individual contributions of various gas discharge mechanisms to total pre-breakdown current in microgaps are quantified numerically. The variation of contributions of field emission and secondary electron emission with increasing electric field shows contrasting behavior even for a given gap size. The total current near breakdown decreases rapidly with gap size indicating that microscale discharges operate in a high-current, low-voltage regime. This study provides the first such analysis of breakdown mechanisms and aids in the formulation of physics-based theories for microscale breakdown.

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On Explanation of the Double-Valued Paschen-Like Curve for RF Breakdown in Argon

Cited by 21 publications

References 3 publications

Breakdown and discharge regimes in standard and micrometer size dc discharges

Breakdown and discharge regimes in standard and micrometer size dc discharges

Using Swarm Models as an Exact Representation of Ionized Gases

Pre-breakdown evaluation of gas discharge mechanisms in microgaps

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