Current overshoot during a set operation has significant impacts on the ON conductance and reliability of resistive change devices such as atom switches. We break the set operation into three steps: incubation, transition, and settling. We clarify their contributions to the determinations of the ON conductance of the atom switch. The variation in the transition time causes a significant variation in the ON conductance. On the basis of the ON conductance distribution, the median of the transition time of 1 ns and its distribution are revealed.