Accurate inductance calculations are critical for the design of both digital and analogue
superconductive integrated circuits, and three-dimensional calculations are gaining
importance with the advent of inductive biasing, inductive coupling and sky plane shielding
for RSFQ cells. InductEx, an extraction programme based on the three-dimensional
calculation software FastHenry, was proposed earlier. InductEx uses segmentation
techniques designed to accurately model the geometries of superconductive integrated
circuit structures. Inductance extraction for complex multi-terminal three-dimensional
structures from current distributions calculated by FastHenry is discussed. Results for
both a reflection plane modelling an infinite ground plane and a finite segmented
ground plane that allows inductive elements to extend over holes in the ground
plane are shown. Several SQUIDs were designed for and fabricated with IPHT’s
1 kA cm − 2
RSFQ1D niobium process. These SQUIDs implement a number of loop structures that
span different layers, include vias, inductively coupled control lines and ground plane
holes. We measured the loop inductance of these SQUIDs and show how the
results are used to calibrate the layer parameters in InductEx and verify the
extraction accuracy. We also show that, with proper modelling, FastHenry can
be fast enough to be used for the extraction of typical RSFQ cell inductances.