On-chip fabrication of SnO2-nanowire gas sensor: The effect of growth time on sensor performance

Thong, Le Viet; Hòa, Nguyễn Đức; Le, Dang Thi Thanh; Viet, Do Thanh; Tam, Phuong Dinh; Le, Anh‐Tuan; Hieu, Nguyen Van

doi:10.1016/j.snb.2010.02.054

Cited by 106 publications

(49 citation statements)

References 27 publications

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“…Ting et al demonstrated the lateral growth of ZnO NWs on chips via selfcatalyzed reactive thermal evaporation, and the product can be used for ethanol detection [17], where the number of NWs that bridge the electrodes to one another was increased to enhance the sensitivity of sensors. The on-chip grown semiconducting metal oxide NRs/NWs for gas sensor applications was believed to have significant advantages in both fabrication process and sensor performance [18], [19]. However, other ways to apply the sensing material on chips are available.…”

Section: Introductionmentioning

confidence: 99%

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Nguyen

Quy

Hòa

et al. 2014

Sensors and Actuators B: Chemical

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Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors. Chemical, http://dx.doi. org/10.1016/j.snb.2013.11.043 Access to the published version may require subscription. N.B. When citing this work, cite the original published paper. Sensors and actuators. B, Abstract:The proper engineering design of gas sensors and the controlled synthesis of sensing materials for the high-performance detection of toxic gas are very important in the fabrication of handheld devices. In this study, an effective design for gas sensor chips is developed to control the formation of grown ZnO nanowires (NWs). The design utilizes the dendrite islands of Au catalyst deposited on and between Pt electrodes of a planar-type micro gas sensor so that NWs can grow on instead of a continuous Au seed layer. This method results in an increase of NW-NW junctions on the device and also eliminates current leakage through the seed layer, which results in a higher sensitivity. The results show that the developed gas-sensing devices could be used to monitor NO 2 at moderate temperature (~250 °C) and/or ethanol at a high temperature (~400 °C).

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Section: Introductionmentioning

confidence: 99%

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Nguyen

Quy

Hòa

et al. 2014

Sensors and Actuators B: Chemical

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“…The gas sensing test set-up is described elsewhere. 23 For these experiments, two certified gas bottles, synthetic air and 100 ppm of HCHO in air, provided by Airliquide ©, were employed to obtain the desired gas mixture inside the chamber (63 cm 3 ).…”

Section: Sensing Test and Chip Fabricationmentioning

confidence: 99%

“…The major advantages of employing nanowires are on one hand, their porous morphology, which increases the surface-to-volume ratio 2 and could lead to a faster response due to gas diffusion improvement. 3 On the other hand, their particular microstructure, free of grain boundaries in the case of single crystalline nanowires, that confer them long-term stability. In this way, a great effort has been carried out in the last decade for developing metal oxide NWs based sensors.…”

Section: Introductionmentioning

confidence: 99%

Formaldehyde sensing mechanism of SnO₂ nanowires grown on-chip by sputtering techniques

et al. 2016

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Tin dioxide nanowires have been grown by thermal oxidation of sputtered thin films by means of a VLS method. A tin sputtered layer catalyzed by gold nanoparticles, acts as material seed for the localized growth of NWs directly on gas sensor devices, avoiding the manipulation and transport of the nanowires to the electrodes. XRD and HRTEM analysis show that the nanowires crystallize in a rutile structure with a [100] preferential growth direction and are single-crystalline with diameters lower than 50 nm. The response of nanowires to formaldehyde has been compared to thin film based sensors. A sensitivity of 0.10 ppm -1 is reported, twofold the sensitivity of the thin film and short response and recovery times are measured (6 times shorter than thin films). The sensing mechanism proposed for the SnO2 NWs under formaldehyde exposure is explained by means of conduction measurements and FT-IR analysis. Oxygen species chemisorbed on the surface of each SnO2 nanowire produce a band bending, which generates a potential barrier (of 0.74± 0.02 eV at 300 ºC) between the point contact of different nanowires. As evidenced by IR spectroscopy at 300 ºC, electrons in the conduction band and in mono-ionized oxygen vacancies (at 0.33 eV below the bottom of the conduction band) are responsible for gas detection.

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“…Depending on the application of interest and availability of fabrication methods, different surface morphology and configurations of the metal oxides have been achieved, including single crystals, thin films, thick films and one dimensional (1-D) nanostructures [35][36][37]. Among all these, following the same trend as for photovoltaics, 1-D nanostructures have recently attracted much attention because of their potential applications in gas sensors [38].…”

Section: Overview and Principlesmentioning

confidence: 99%

“…The development of fabrication methods for producing 1-D nanostructures has been the object of an intense research in the field of nanoscience and nanotechnology [37,44,46]. The sensor's response to a given gas can be enhanced by the modification of both surface states and bulk properties of the 1-D metal-oxide nanostructures.…”

Section: Techniques and Recent Developmentsmentioning

confidence: 99%

Nanostructured TiO2 Layers for Photovoltaic and Gas Sensing Applications

Decroly¹,

Krumpmann²,

Debliquy³

et al. 2016

Green Nanotechnology - Overview and Further Prospects

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Titanium dioxide (TiO 2 ) has been an important material for decades, combining numerous attractive properties in terms of economy (low price, large availability) or ecology (nontoxic), as well as broad physical and chemical possibilities. In the last few years, the development of nanotechnologies offered new opportunities, not only in an academic perspective but also with a view to many applications with particular reference to the environment. This chapter focuses on the many ways that allow to tailor and organize TiO 2 crystallites at the nanometre scale to make the most of this amazing material in the field of photovoltaics and gas sensing.

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On-chip fabrication of SnO2-nanowire gas sensor: The effect of growth time on sensor performance

Cited by 106 publications

References 27 publications

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Formaldehyde sensing mechanism of SnO₂ nanowires grown on-chip by sputtering techniques

Nanostructured TiO2 Layers for Photovoltaic and Gas Sensing Applications

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On-chip fabrication of SnO2-nanowire gas sensor: The effect of growth time on sensor performance

Cited by 106 publications

References 27 publications

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Controllable growth of ZnO nanowires grown on discrete islands of Au catalyst for realization of planar-type micro gas sensors

Formaldehyde sensing mechanism of SnO2 nanowires grown on-chip by sputtering techniques

Nanostructured TiO2 Layers for Photovoltaic and Gas Sensing Applications

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Formaldehyde sensing mechanism of SnO₂ nanowires grown on-chip by sputtering techniques