On CD-AFM bias related to probe bending

Ukraintsev, Vladimir A.; Orji, Ndubuisi G.; Vorburger, Theodore V.; Dixson, Ronald G.; Fu, Joseph; Silver, Richard M.

doi:10.1117/12.916737

Cited by 1 publication

(2 citation statements)

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“…(3.1 ± 1.3) eV. Ukraintsev et al have investigated the interaction with carbon nanotube tips [8]. They have observed values that are significantly larger than the theoretically obtained values, too.…”

Section: Interaction Forcesmentioning

confidence: 91%

See 1 more Smart Citation

Geometry distortions of nanostructure edges scanned with amplitude-modulated atomic force microscopes

Hüser¹,

Häßler-Grohne²,

Hüser³

2013

Meas. Sci. Technol.

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In nanotechnology and semiconductor fabrication geometry parameters of nanostructures such as curvatures and side wall angles are of increasing relevance with decreasing feature sizes. The atomic force microscope (AFM) is still one of the main measurement tools employed to investigate topographical parameters. It is generally operated in oscillation mode in order to avoid wear or damage of the probe. As imaging instruments deliver data that are influenced by the probing process, appropriate reconstruction processes are needed. This paper shows a significant contrast of the phase lag of the probe of an amplitude-modulated AFM (AM-AFM) and its driving force at the edge transition of nanostructures with a high aspect ratio. A simulation model reveals the relation between interaction forces and the observed phase behavior. It illustrates how the equilibrium positions of an oscillating probe differ from those of a sample geometry that is purely dilated by static probe tip contact. We show that AFM measurements in oscillation mode deliver a distorted topography image and that the greater the distortion the more energy dissipation is involved. An understanding of the distortion mechanism forms the basis for the development of reconstruction strategies.

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Section: Interaction Forcesmentioning

confidence: 91%

“…Besides the morphological aspect of the probe geometry, varying interaction forces cause a variation of the topography mapping. An apparent deformation of the sample geometry may be caused by tip bending [8]. Bending occurs if larger forces act on one side of a tip with a long, not sufficiently stiff shaft.…”

Section: Introductionmentioning

confidence: 99%